OPTIMIZED ACTUATORS FOR ULTRA-THIN MIRRORS
    1.
    发明申请
    OPTIMIZED ACTUATORS FOR ULTRA-THIN MIRRORS 有权
    用于超薄镜的优化执行器

    公开(公告)号:US20150316763A1

    公开(公告)日:2015-11-05

    申请号:US14702567

    申请日:2015-05-01

    CPC classification number: G02B26/0825 G02B26/0858 H01L41/047 H01L41/0926

    Abstract: A method and apparatus for correcting error modes of a deformable mirror, including selecting or targeting one or more target error modes of a deformable mirror; and designing a pattern and/or shape of one or more electrodes, wherein the pattern and/or shape of the electrodes are designed to optimally correct the target error modes when the electrodes are disposed on the deformable mirror via an active material. Also disclosed is a deformable structure, including a composite shell including a plurality of plies each including carbon fibers embedded in a resin; a nanolaminate comprising individual nanolayers attached to a first side of the composite shell; an actuation structure attached to a second side of the composite shell; and a flexible electrode routing layer attached to the actuation structure.

    Abstract translation: 一种用于校正可变形反射镜的误差模式的方法和装置,包括选择或瞄准可变形反射镜的一个或多个目标误差模式; 以及设计一个或多个电极的图案和/或形状,其中电极的图案和/或形状被设计成当电极经由活性材料设置在可变形反射镜上时最佳地校正目标误差模式。 还公开了一种可变形结构,包括复合壳,其包括多个层,每个层包括嵌入树脂中的碳纤维; 包含附着在所述复合壳体的第一侧上的单个纳米层的纳米材料; 附接到复合壳体的第二侧的致动结构; 以及附接到致动结构的柔性电极布线层。

    DEFORMABLE MIRRORS AND METHODS OF MAKING THE SAME
    2.
    发明申请
    DEFORMABLE MIRRORS AND METHODS OF MAKING THE SAME 审中-公开
    可变形反射镜及其制造方法

    公开(公告)号:US20130301113A1

    公开(公告)日:2013-11-14

    申请号:US13865179

    申请日:2013-04-17

    Abstract: A deformable mirror is configured to be deformed by surface-parallel actuation. In one embodiment, the deformable mirror includes a first piezoelectric active layer on a first surface of a substrate. The first piezoelectric active layer has a substantially uniform thickness across the first surface of the substrate. The mirror also includes a first electrode layer on the first piezoelectric active layer. The first electrode layer has a plurality of electrodes arranged in a first pattern and has a substantially uniform thickness across the first piezoelectric active layer. The mirror may further include a second piezoelectric layer on the first electrode layer, and a second electrode layer on the second piezoelectric layer. The electrodes of the first and second electrode layers are configured to supply a voltage to the piezoelectric active layers upon actuation to thereby locally deform the shape of the mirror to correct for optical aberrations.

    Abstract translation: 可变形反射镜被构造成通过表面平行致动而变形。 在一个实施例中,可变形反射镜包括在基板的第一表面上的第一压电有源层。 第一压电有源层在衬底的第一表面上具有基本均匀的厚度。 反射镜还包括在第一压电有源层上的第一电极层。 第一电极层具有布置成第一图案的多个电极,并且跨越第一压电有源层具有基本均匀的厚度。 反射镜还可以包括第一电极层上的第二压电层和第二压电层上的第二电极层。 第一和第二电极层的电极构造成在致动时向压电有源层提供电压,从而局部地使反射镜的形状变形以校正光学像差。

    Optimized actuators for ultra-thin mirrors

    公开(公告)号:US09964755B2

    公开(公告)日:2018-05-08

    申请号:US14702567

    申请日:2015-05-01

    CPC classification number: G02B26/0825 G02B26/0858 H01L41/047 H01L41/0926

    Abstract: A method and apparatus for correcting error modes of a deformable mirror, including selecting or targeting one or more target error modes of a deformable mirror; and designing a pattern and/or shape of one or more electrodes, wherein the pattern and/or shape of the electrodes are designed to optimally correct the target error modes when the electrodes are disposed on the deformable mirror via an active material. Also disclosed is a deformable structure, including a composite shell including a plurality of plies each including carbon fibers embedded in a resin; a nanolaminate comprising individual nanolayers attached to a first side of the composite shell; an actuation structure attached to a second side of the composite shell; and a flexible electrode routing layer attached to the actuation structure.

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