公开(公告)号：US20180201395A1

公开(公告)日：2018-07-19

申请号：US14800436

申请日：2015-07-15

Applicant: California Institute of Technology

Inventor： Cecile Jung-Kubiak ,  Colleen M. Marrese-Reading ,  Victor E. White ,  Daniel W. Wilson ,  Matthew R. Dickie ,  Karl Y. Yee ,  Richard E. Muller ,  James E. Polk ,  John R. Anderson ,  Nima Rouhi ,  Frank Greer

IPC: B64G1/40

CPC classification number: B64G1/405

Abstract: Micro-emitter arrays and methods of microfabricating such emitter arrays are provided. The microfabricated emitter arrays incorporate a plurality of emitters with heights greater than 280 microns with uniformity of +/−10 microns arranged on a supporting silicon substrate, each emitter comprising an elongated body extending from the top surface of the substrate and incorporating at least one emitter tip on the distal end of the elongated body thereof. The emitters may be disposed on the substrate in an ordered array in an X by Y grid pattern, wherein X and Y can be any number greater than zero. The micro-emitter arrays may utilize a LMIS propellant source including, for example, gallium, indium, bismuth, or tin. The substrate may incorporate at least one through-via providing a fluid pathway for the LMIS propellant to flow from a propellant reservoir beneath the substrate to the top substrate surface whereupon the micro-emitter array is disposed.

公开(公告)号：US10384810B2

公开(公告)日：2019-08-20

申请号：US14800436

申请日：2015-07-15

Applicant: California Institute of Technology

Inventor： Cecile Jung-Kubiak ,  Colleen M. Marrese-Reading ,  Victor E. White ,  Daniel W. Wilson ,  Matthew R. Dickie ,  Karl Y. Yee ,  Richard E. Muller ,  James E. Polk ,  John R. Anderson ,  Nima Rouhi ,  Frank Greer

IPC: B64G1/40

Abstract: Micro-emitter arrays and methods of microfabricating such emitter arrays are provided. The microfabricated emitter arrays incorporate a plurality of emitters with heights greater than 280 microns with uniformity of +/−10 microns arranged on a supporting silicon substrate, each emitter comprising an elongated body extending from the top surface of the substrate and incorporating at least one emitter tip on the distal end of the elongated body thereof. The emitters may be disposed on the substrate in an ordered array in an X by Y grid pattern, wherein X and Y can be any number greater than zero. The micro-emitter arrays may utilize a LMIS propellant source including, for example, gallium, indium, bismuth, or tin. The substrate may incorporate at least one through-via providing a fluid pathway for the LMIS propellant to flow from a propellant reservoir beneath the substrate to the top substrate surface whereupon the micro-emitter array is disposed.