公开(公告)号：US20210101148A1

公开(公告)日：2021-04-08

申请号：US17065459

申请日：2020-10-07

Applicant: Cornell University

Inventor： Amit LAL ,  Adarsh RAVI ,  Alexander RUYACK ,  Justin KUO

IPC: B01L3/00 ,  F04B17/00

Abstract: In one aspect a high frequency ultrasonic microfluidic flow control device is disclosed. The device includes an array of ultrasonic transducers arranged to direct ultrasound to a microfluidic channel. The device further includes one or more driver circuits. Each ultrasonic transducer is associated with one of the one or more driver circuits, and each ultrasonic transducer is driven by a driver signal from the associated driver circuit. The array of ultrasonic transducers and one or more driver circuits are produced in the same semiconductor fabrication process. The device further includes one or more electrical contacts associated with each ultrasonic transducer in the array if ultrasonic transducers, wherein the one or more electrical contacts associated with each ultrasonic transducer applies the driver signal from the associated ultrasonic driver circuit.