公开(公告)号：US09244121B2

公开(公告)日：2016-01-26

申请号：US14307417

申请日：2014-06-17

Applicant: DCG SYSTEMS, INC.

Inventor： Yin Shyang Ng ,  Dmitry Skvortsov

IPC: G01R31/308 ,  G01R31/311

CPC classification number: G01R31/311 ,  G01J3/28 ,  G01J2003/283

Abstract: An apparatus and method for laser probing of a DUT is disclosed. The system enables laser voltage imaging state mapping of devices within the DUT. A selected area of the DUT is illuminating a while the DUT is receiving test signals causing certain of the active devices to modulate. Light reflected from the DUT is collected and is converted into an electrical signal. Phase information is extracting from the electrical signal and a two-dimensional image is generated from the phase information, wherein the two-dimensional image spatially correlates to the selected area.

Abstract translation: 公开了一种用于DUT的激光探测的装置和方法。 该系统实现DUT内的器件的激光电压成像状态映射。 DUT的选定区域在DUT正在接收到导致某些有源器件调制的测试信号的同时点亮。 从DUT被反射的光被收集并转换成电信号。 从电信号提取相位信息，并从相位信息生成二维图像，其中二维图像与所选择的区域空间相关。

公开(公告)号：US20160139200A1

公开(公告)日：2016-05-19

申请号：US15003742

申请日：2016-01-21

Applicant: DCG Systems, Inc.

Inventor： Yin Shyang Ng ,  Dmitry Skvortsov

IPC: G01R31/311 ,  G01J3/28

CPC classification number: G01R31/311 ,  G01J3/28 ,  G01J2003/283

Abstract: An apparatus and method for laser probing of a DUT is disclosed. The system enables laser voltage imaging state mapping of devices within the DUT. A selected area of the DUT is illuminating a while the DUT is receiving test signals causing certain of the active devices to modulate. Light reflected from the DUT is collected and is converted into an electrical signal. Phase information is extracting from the electrical signal and a two-dimensional image is generated from the phase information, wherein the two-dimensional image spatially correlates to the selected area.

Abstract translation: 公开了一种用于DUT的激光探测的装置和方法。 该系统实现DUT内的器件的激光电压成像状态映射。 DUT的选定区域在DUT正在接收到导致某些有源器件调制的测试信号的同时点亮。 从DUT被反射的光被收集并转换成电信号。 从电信号提取相位信息，并从相位信息生成二维图像，其中二维图像与所选择的区域空间相关。

公开(公告)号：US20140292363A1

公开(公告)日：2014-10-02

申请号：US14307417

申请日：2014-06-17

Applicant: DCG SYSTEMS, INC.

Inventor： Yin Shyang Ng ,  Dmitry Skvortsov

IPC: G01R31/311

CPC classification number: G01R31/311 ,  G01J3/28 ,  G01J2003/283

Abstract: An apparatus and method for laser probing of a DUT is disclosed. The system enables laser voltage imaging state mapping of devices within the DUT. A selected area of the DUT is illuminating a while the DUT is receiving test signals causing certain of the active devices to modulate. Light reflected from the DUT is collected and is converted into an electrical signal. Phase information is extracting from the electrical signal and a two-dimensional image is generated from the phase information, wherein the two-dimensional image spatially correlates to the selected area.

Abstract translation: 公开了一种用于DUT的激光探测的装置和方法。 该系统实现DUT内的器件的激光电压成像状态映射。 DUT的选定区域在DUT正在接收到导致某些有源器件调制的测试信号的同时点亮。 从DUT被反射的光被收集并转换成电信号。 从电信号提取相位信息，并从相位信息生成二维图像，其中二维图像与所选择的区域空间相关。