THERMAL FLOW RATE SENSOR
    2.
    发明申请

    公开(公告)号:US20220120597A1

    公开(公告)日:2022-04-21

    申请号:US17565049

    申请日:2021-12-29

    Abstract: A thin film is formed on a substrate on which an opening having two opposite sides are formed, and forms a membrane. The thin film has an upstream temperature sensor and a downstream temperature sensor on both sides of a heater. A heat conductive member covers the two sides and is arranged on both sides of the heater, the upstream temperature sensor, and the downstream temperature sensor so as to promote heat conduction from the heater to the substrate. When an end of the opening on the membrane side is defined as an upper end and an end on the side away from the membrane is defined as a lower end, the heat conductive member covers from the upper end to the lower end of the opening in a normal direction of the membrane.

    PHYSICAL QUANTITY MEASUREMENT DEVICE

    公开(公告)号:US20220018697A1

    公开(公告)日:2022-01-20

    申请号:US17449683

    申请日:2021-10-01

    Abstract: A sensor recess portion is provided on a sensor back surface. A membrane portion provided with a detection element forms a bottom surface of the sensor recess portion. A sensor support portion includes a back support portion, a support recess portion, a support hole, and a support recess inner wall surface. The back support portion covers an opening of the sensor recess portion. The support recess portion is provided on a side opposite from a physical quantity sensor. The support hole penetrates the back support portion and communicates with the opening. The support recess inner wall surface extends from the support recess bottom portion and is inclined with respect to a center line of the support hole.

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