公开(公告)号：US20230326939A1

公开(公告)日：2023-10-12

申请号：US18042505

申请日：2021-07-26

Applicant: DIRECT ELECTRON, LP

Inventor： Benjamin BAMMES ,  Robert BILHORN

IPC: H01L27/146 ,  G01T1/24

CPC classification number: H01L27/14612 ,  G01T1/244 ,  H01L27/14659 ,  H01L27/14683

Abstract: A detector is provided for forming images by detecting electrons in an electron microscope at energies in the range of 3 keV to 300 keV, more specifically in the range of 40 keV to 120 keV with very high spatial resolution and sensitivity. The detector is formed by bonding a handling wafer to the front side of a planarized monolithic active pixel sensor (MAPS), partially or completely removing the substrate layer on the back side and selectively removing the handling material from the front side to leave a periphery of handling material in the non-image forming area. The detector may be mounted in an electron microscope for back side illumination. The detector provides high resolution images at low-energies due to back side illumination and at higher energies due to a decreased epitaxial layer thickness and the absence of any backscattering substrate material.

公开(公告)号：US20200336646A1

公开(公告)日：2020-10-22

申请号：US16851931

申请日：2020-04-17

Applicant: Direct Electron, LP

Inventor： Benjamin BAMMES ,  Robert BILHORN

IPC: H04N5/235 ,  H04N5/341 ,  H04N5/365

Abstract: The present disclosure relates to an apparatus and methods for generating a hybrid image by high-dynamic-range counting. In an embodiment, the apparatus includes a processing circuitry configured to acquire an image from a pixelated detector, obtain a sparsity map of the acquired image, the sparsity map indicating low-flux regions of the acquired image and high-flux regions of the acquired image, generate a low-flux image and a high-flux image based on the sparsity map, perform event analysis of the acquired image based on the low-flux image and the high-flux image, the event analysis including detecting, within the low-flux image, incident events by an event counting mode, multiply, by a normalization constant, resulting intensities of the high-flux image and the detected incident events of the low-flux image, and generate the hybrid image by merging the low-flux image and the high-flux image.

公开(公告)号：US20230145436A1

公开(公告)日：2023-05-11

申请号：US17905128

申请日：2021-03-01

Applicant: DIRECT ELECTRON, LP

Inventor： Benjamin BAMMES ,  Robert BILHORN

IPC: H01J37/295

CPC classification number: H01J37/2955 ,  H01J2237/2803 ,  H01J2237/2446 ,  H01J2237/24475 ,  H01J2237/24495

Abstract: A method of, and a detector for, performing energy sensitive imaging of ionizing radiation are provided, including acquiring a first frame having a plurality of pixels, each pixel of the plurality having an energy of detection and a location; grouping, into a cluster, pixels of the plurality having an energy of detection above a predetermined threshold and a location along with at least one other pixel also having an energy of detection above the predetermined threshold and being within a predetermined distance of the location; summing the energy of detection of all pixels within the grouped cluster to determine a cluster energy; determining a location of the cluster based on a distribution and an intensity of the summed energy of detection; and generating an image of the cluster based on the determined cluster energy and the determined location of the cluster.

公开(公告)号：US20200335301A1

公开(公告)日：2020-10-22

申请号：US16851835

申请日：2020-04-17

Applicant: Direct Electron, LP

Inventor： Benjamin BAMMES ,  Robert BILHORN

IPC: H01J37/28

Abstract: The present disclosure relates to transmission electron microscopy for evaluation of biological matter. According to an embodiment, the present disclosure further relates to an apparatus for determining the structure and/or elemental composition of a sample using 4D STEM, comprising a direct bombardment detector operating with global shutter readout, processing circuitry configured to acquire images of bright-field disks using either a contiguous array or non-contiguous array of detector pixel elements, correct distortions in the images, align each image of the images based on a centroid of the bright-field disk, calculate a radial profile of the images, normalize the radial profiles by a scaling factor, calculate the rotationally-averaged edge profile of the bright-field disk, and determine elemental composition within the specimen based on the characteristics of the edge profile of the bright-field disk corresponding to each specimen location.