公开(公告)号：US20240077079A1

公开(公告)日：2024-03-07

申请号：US18508671

申请日：2023-11-14

Applicant: EBARA CORPORATION

Inventor： Keiji MAISHIGI ,  Tetsuro SUGIURA ,  Katsuaki USUI ,  Masahiro HATAKEYAMA ,  Chikako HONMA ,  Toru OSUGA ,  Koichi IWASAKI ,  Jie Yuan LIN

IPC: F04C28/28 ,  F04D27/00 ,  G06F9/54 ,  G06F17/18

CPC classification number: F04C28/28 ,  F04D27/001 ,  G06F9/542 ,  G06F17/18

Abstract: An information processing apparatus detecting presence or absence of abnormality of a vacuum pump derived from a product produced within a target vacuum pump, including: a determination unit configured to determine a normal variation range or a normal time variation behavior of a target state quantity which is a state quantity varying depending on a load of gas flowing into the vacuum pump, based on at least one of past target state quantities of the target vacuum pump or another vacuum pump; and a comparison unit configured to compare a current target state quantity of the target vacuum pump with the normal variation range or the normal time variation behavior and output the comparison result.