公开(公告)号：US20150260174A1

公开(公告)日：2015-09-17

申请号：US14656652

申请日：2015-03-12

Applicant: EBARA CORPORATION

Inventor： Hiroki FURUTA ,  Koichi IWASAKI ,  Keiichi ISHIKAWA ,  Tetsuo KOMAI ,  Shinichi SEKIGUCHI

IPC: F04B23/04 ,  F04B49/02 ,  F04B49/24 ,  F04B15/04 ,  F04B17/03

CPC classification number: F04B23/04 ,  B01D53/005 ,  B01D53/323 ,  B01D53/8659 ,  B01D53/8662 ,  B01D2257/2025 ,  B01D2257/2027 ,  B01D2257/2045 ,  B01D2257/2047 ,  B01D2257/2064 ,  B01D2257/2066 ,  B01D2257/553 ,  B01D2258/0216 ,  C23C16/4412 ,  F04B15/04 ,  F04B17/03 ,  F04B49/02 ,  F04B49/24 ,  F04D17/168 ,  F04D19/04 ,  F05D2260/607 ,  Y02C20/30 ,  Y02P70/605

Abstract: A vacuum pump with abatement function which can prevent contamination of a process chamber without allowing products generated by exhaust gas treatment to flow back to the process chamber, and can reduce the amount of gas to be treated without allowing a purge gas and a diluent gas to be contained in an exhaust gas, and thus can achieve energy saving by reducing the amount of energy required for the exhaust gas treatment in an abatement part is disclosed. The vacuum pump with abatement function includes a vacuum pump to which at least one abatement part for treating an exhaust gas is attached. The vacuum pump comprises a dry vacuum pump having a main pump capable of evacuating gas from an atmospheric pressure and a booster pump for increasing an evacuation speed of the main pump, and the at least one abatement part for treating the exhaust gas is connected between the main pump and the booster pump.

Abstract translation: 具有减轻功能的真空泵，其可以防止处理室的污染，而不允许废气处理产生的产物流回到处理室，并且可以减少待处理的气体的量，而不允许吹扫气体和稀释气体 被包含在废气中，因此可以通过减少减排部分中废气处理所需的能量来实现节能。 具有减排功能的真空泵包括：真空泵，至少一个用于处理废气的消除部分被附接到该真空泵。 该真空泵包括干式真空泵，其具有能够从大气压抽出气体的主泵和用于提高主泵的抽空速度的增压泵，并且用于处理废气的至少一个减排部分连接在 主泵和增压泵。

公开(公告)号：US20240077079A1

公开(公告)日：2024-03-07

申请号：US18508671

申请日：2023-11-14

Applicant: EBARA CORPORATION

Inventor： Keiji MAISHIGI ,  Tetsuro SUGIURA ,  Katsuaki USUI ,  Masahiro HATAKEYAMA ,  Chikako HONMA ,  Toru OSUGA ,  Koichi IWASAKI ,  Jie Yuan LIN

IPC: F04C28/28 ,  F04D27/00 ,  G06F9/54 ,  G06F17/18

CPC classification number: F04C28/28 ,  F04D27/001 ,  G06F9/542 ,  G06F17/18

Abstract: An information processing apparatus detecting presence or absence of abnormality of a vacuum pump derived from a product produced within a target vacuum pump, including: a determination unit configured to determine a normal variation range or a normal time variation behavior of a target state quantity which is a state quantity varying depending on a load of gas flowing into the vacuum pump, based on at least one of past target state quantities of the target vacuum pump or another vacuum pump; and a comparison unit configured to compare a current target state quantity of the target vacuum pump with the normal variation range or the normal time variation behavior and output the comparison result.

公开(公告)号：US20150260192A1

公开(公告)日：2015-09-17

申请号：US14644135

申请日：2015-03-10

Applicant: Ebara Corporation

Inventor： Koichi IWASAKI ,  Hiroki FURUTA ,  Keiichi ISHIKAWA ,  Tetsuo KOMAI ,  Shinichi SEKIGUCHI

IPC: F04D19/04 ,  F04D27/00

CPC classification number: F04D19/04 ,  B01D53/005 ,  B01D53/323 ,  B01D53/8659 ,  B01D53/8662 ,  B01D53/8671 ,  B01D2257/2025 ,  B01D2257/2027 ,  B01D2257/2045 ,  B01D2257/2047 ,  B01D2257/2064 ,  B01D2257/2066 ,  B01D2257/553 ,  B01D2258/0216 ,  C23C16/4412 ,  F05D2260/607 ,  Y02C20/30 ,  Y02P70/605

Abstract: A vacuum pump with abatement function which can prevent contamination of a process chamber without allowing products generated by exhaust gas treatment to flow back to the process chamber, and can reduce the amount of gas to be treated without allowing a purge gas and a diluent gas to be contained in an exhaust gas, and thus can achieve energy saving by reducing the amount of energy required for the exhaust gas treatment in an abatement part is disclosed. The vacuum pump with abatement function includes a vacuum pump to which at least one abatement part for treating an exhaust gas is attached. The vacuum pump comprises a dry vacuum pump having a pair of multistage pump rotors each of which comprises a plurality of rotors arranged on a rotating shaft, and the at least one abatement part is connected to an interstage of the multistage pump rotors.

Abstract translation: 具有减轻功能的真空泵，其可以防止处理室的污染，而不允许废气处理产生的产物流回到处理室，并且可以减少待处理的气体的量，而不允许吹扫气体和稀释气体 被包含在废气中，因此可以通过减少减排部分中废气处理所需的能量来实现节能。 具有减排功能的真空泵包括：真空泵，至少一个用于处理废气的消除部分被附接到该真空泵。 真空泵包括具有一对多级泵转子的干式真空泵，每个泵转子包括设置在旋转轴上的多个转子，并且至少一个减排部分连接到多级泵转子的级间。