公开(公告)号：US20240123391A1

公开(公告)日：2024-04-18

申请号：US18376471

申请日：2023-10-04

Applicant: ENTEGRIS, INC.

Inventor： Robert Wright, JR. ,  Bryan Hendrix ,  Loren Press ,  Benjamin Garrett

IPC: B01D53/00 ,  C01G41/04

CPC classification number: B01D53/002 ,  C01G41/04

Abstract: Tungsten precursors with high purity and methods for purifying tungsten precursors are provided. The method for purifying a precursor may comprise at least one of the following steps: obtaining a source vessel containing WCl4, WOCl4, and one of WCl5 or WCl6; separating the WCl5 or the WCl6 from at least a first portion of the WOCl4; separating the WCl5 or the WCl6 from at least a second portion of the WOCl4; recovering a precursor in a collection vessel; or any combination thereof.

公开(公告)号：US20240116774A1

公开(公告)日：2024-04-11

申请号：US18376476

申请日：2023-10-04

Applicant: ENTEGRIS, INC.

Inventor： Loren Press ,  Benjamin Garrett ,  Michael Watson ,  Scott L. Battle ,  Thomas M. Cameron ,  Bryan Hendrix

IPC: C01G41/04

CPC classification number: C01G41/04

Abstract: A precursor comprises a tungsten precursor and a carbon-containing material. The precursor comprises less than 0.02% by weight of the carbon-containing material based on a total weight of the precursor. A method for purifying a tungsten precursor may comprise at least one of the following steps: obtaining a source vessel containing a tungsten precursor and a carbon-containing material; separating the tungsten precursor from at least a first portion of the carbon-containing material; recovering a precursor in a collection vessel; or any combination thereof.