公开(公告)号：US20230366085A1

公开(公告)日：2023-11-16

申请号：US18197051

申请日：2023-05-13

Applicant: ENTEGRIS, INC.

Inventor： Benjamin Harrison Olson ,  Jacob Thomas ,  Scott L. Battle ,  Bryan C. Hendrix ,  Dalton Vance Locklear ,  Aniket Joshi ,  Christopher Calhoun

IPC: C23C16/448 ,  C23C16/08

CPC classification number: C23C16/4485 ,  C23C16/08

Abstract: A tray assembly comprises a plurality of trays. Each of the plurality of trays comprises a first tray portion and a second tray portion which are couplable together by a retainer and which are engageable with a cam member. Depending on the orientation of the cam member, each of the plurality of trays of the tray assembly is configurable between an expanded configuration and a collapsed configuration. In the collapsed configuration, the tray assembly is insertable into an ampoule. In the expanded configuration, the tray assembly is removable from an ampoule.