公开(公告)号：US20250019822A1

公开(公告)日：2025-01-16

申请号：US18769237

申请日：2024-07-10

Applicant: ENTEGRIS, INC.

Inventor： Bryan C. Hendrix ,  Scott L. Battle ,  Dalton Vance Locklear

IPC: C23C16/44 ,  C23C16/12 ,  C23C16/448

Abstract: Metal getters in vaporizers, and related systems and methods, are provided. A vaporizer comprises a vessel having an outlet. The vessel is configured to discharge a metal halide vapor through the outlet. The vaporizer comprises a metal getter located within the vessel between the inlet and the outlet. When an oxygen-containing species is present within the vessel, an impurity content of the metal halide vapor that is discharged from the vessel is less than an impurity content of a precursor vapor that is discharged from a vessel without the metal getter.

公开(公告)号：US20240002081A1

公开(公告)日：2024-01-04

申请号：US18214241

申请日：2023-06-26

Applicant: ENTEGRIS, INC.

Inventor： Benjamin H. Olson ,  Dalton Vance Locklear ,  Bryan C. Hendrix ,  Jacob Thomas ,  Aniket Joshi ,  Scott L. Battle ,  Benjamin Cardozo ,  Benjamin R. Garrett ,  Juan Valdez ,  Michael Watson

IPC: B65B1/22 ,  B65B1/06

CPC classification number: B65B1/22 ,  B65B1/06

Abstract: A system including a vessel for containing a fill material and a vibration source connected to the vessel. The vibration source can increase a bulk density of the fill material. A fill material ratio can be defined as a particle density of the fill material divided by the bulk density of the fill material after vibration. After the vibration source increases the bulk density of the fill material, the fill material ratio can range from about 0.15 to about 0.75.

公开(公告)号：US20230366085A1

公开(公告)日：2023-11-16

申请号：US18197051

申请日：2023-05-13

Applicant: ENTEGRIS, INC.

Inventor： Benjamin Harrison Olson ,  Jacob Thomas ,  Scott L. Battle ,  Bryan C. Hendrix ,  Dalton Vance Locklear ,  Aniket Joshi ,  Christopher Calhoun

IPC: C23C16/448 ,  C23C16/08

CPC classification number: C23C16/4485 ,  C23C16/08

Abstract: A tray assembly comprises a plurality of trays. Each of the plurality of trays comprises a first tray portion and a second tray portion which are couplable together by a retainer and which are engageable with a cam member. Depending on the orientation of the cam member, each of the plurality of trays of the tray assembly is configurable between an expanded configuration and a collapsed configuration. In the collapsed configuration, the tray assembly is insertable into an ampoule. In the expanded configuration, the tray assembly is removable from an ampoule.