公开(公告)号：US20230366085A1

公开(公告)日：2023-11-16

申请号：US18197051

申请日：2023-05-13

Applicant: ENTEGRIS, INC.

Inventor： Benjamin Harrison Olson ,  Jacob Thomas ,  Scott L. Battle ,  Bryan C. Hendrix ,  Dalton Vance Locklear ,  Aniket Joshi ,  Christopher Calhoun

IPC: C23C16/448 ,  C23C16/08

CPC classification number: C23C16/4485 ,  C23C16/08

Abstract: A tray assembly comprises a plurality of trays. Each of the plurality of trays comprises a first tray portion and a second tray portion which are couplable together by a retainer and which are engageable with a cam member. Depending on the orientation of the cam member, each of the plurality of trays of the tray assembly is configurable between an expanded configuration and a collapsed configuration. In the collapsed configuration, the tray assembly is insertable into an ampoule. In the expanded configuration, the tray assembly is removable from an ampoule.

公开(公告)号：US20230298909A1

公开(公告)日：2023-09-21

申请号：US18123447

申请日：2023-03-20

Applicant: ENTEGRIS, INC.

Inventor： Michael Watson ,  Christopher Calhoun ,  Cristian Ocampo ,  Scott L. Battle ,  Benjamin Cardozo ,  Benjamin R. Garrett

IPC: H01L21/67 ,  C23C16/448 ,  C23C16/455 ,  C23C16/08

CPC classification number: H01L21/67017 ,  C23C16/448 ,  C23C16/45561 ,  C23C16/08

Abstract: Systems and methods for controlling precursor delivery. The systems and methods may comprise a precursor delivery vessel in fluid communication with a gas flow line. The precursor delivery vessel may comprise at least one tray containing a vaporizable precursor. An amount of thermal energy may be supplied to the at least one tray in an amount sufficient to vaporize the vaporizable precursor. The vaporized precursor may be dispensed from the precursor delivery vessel to the gas flow line. The amount of thermal energy supplied to the at least one tray may be adjusted sufficient to maintain a pressure of the vaporized precursor, in the gas flow line, within a pressure range.