公开(公告)号：US20200248873A1

公开(公告)日：2020-08-06

申请号：US16855684

申请日：2020-04-22

Applicant: ENTEGRIS, INC.

Inventor： Daniel ELZER ,  Ying TANG ,  Barry L. CHAMBERS ,  Joseph D. SWEENEY ,  Shaun M. WILSON ,  Steven E. BISHOP ,  Steven ULANECKI ,  James V. MCMANUS ,  Oleg BYL ,  Christopher SCANNELL ,  Edward E. JONES ,  Joseph R. DESPRES

IPC: F17C13/04 ,  F17C11/00

Abstract: Fluid dispensing assemblies are disclosed, for use in fluid supply packages in which such fluid dispensing assemblies as coupled to fluid supply vessels, for dispensing of fluids such as semiconductor manufacturing fluids. The fluid dispensing assemblies in specific implementations are configured to prevent application of excessive force to valve elements in the fluid dispensing assemblies, and/or for avoiding inadvertent or accidental open conditions of vessels that may result in leakage of toxic or otherwise hazardous or valuable gas. Also described are alignment devices for assisting coupling of coupling elements, e.g., coupling elements of fluid supply packages of the foregoing type, so that damage to such couplings as a result of misalignment is avoided.

公开(公告)号：US20180221851A1

公开(公告)日：2018-08-09

申请号：US15506158

申请日：2015-08-22

Applicant: ENTEGRIS, INC.

Inventor： Melissa A. PETRUSKA ,  Edward A. STURM ,  Shaun M. WILSON

IPC: B01J20/20 ,  C01B32/318 ,  B01J20/28 ,  B01J20/30 ,  B01D53/02 ,  F17C11/00

CPC classification number: B01J20/20 ,  B01D53/02 ,  B01D2253/102 ,  B01D2253/342 ,  B01J20/28011 ,  B01J20/28016 ,  B01J20/28042 ,  B01J20/28057 ,  B01J20/28064 ,  B01J20/2808 ,  B01J20/28092 ,  B01J20/3078 ,  B01J20/3085 ,  B01J2220/4825 ,  B01J2220/4831 ,  B01J2220/4837 ,  B01J2220/485 ,  B01J2220/4875 ,  C01B32/05 ,  C01B32/318 ,  C01B32/324 ,  C01B32/366 ,  C01P2006/10 ,  C01P2006/12 ,  F17C11/00 ,  F17C11/002 ,  F17C11/005 ,  F17C11/007 ,  F17C2270/0168 ,  F17C2270/0518 ,  H01G11/24 ,  H01G11/34 ,  Y02C10/08

Abstract: A carbon pyrolyzate material is disclosed, having utility as an adsorbent as well as for energy storage and other applications. The pyrolyzate material comprises microporous carbon derived from low cost naturally-occurring carbohydrate source material such as polysaccharides. In adsorbent applications, the carbon pyrolyzate may for example be produced in a particulate form or a monolithic form, having high density and high pore volume to maximize gas storage and delivery, with the pore size distribution of the carbon pyrolyzate adsorbent being tunable via activation conditions to optimize storage capacity and delivery for specific gases of interest.

公开(公告)号：US20180119888A1

公开(公告)日：2018-05-03

申请号：US15573020

申请日：2016-05-11

Applicant: ENTEGRIS, INC.

Inventor： Daneil ELZER ,  Ying TANG ,  Barry Lewis CHAMBERS ,  Joseph D. SWEENEY ,  Shaun M. WILSON ,  Steven ULANECKI ,  Steven E. BISHOP ,  James V. MCMANUS ,  Karl W. OLANDER ,  Edward E. JONES ,  Oleg BYL ,  Joseph R. DESPRES ,  Christopher SCANNELL

IPC: F17C13/04

CPC classification number: F17C13/04 ,  F17C11/00 ,  F17C2201/0114 ,  F17C2201/0119 ,  F17C2201/058 ,  F17C2203/0617 ,  F17C2205/0308 ,  F17C2205/0329 ,  F17C2205/0335 ,  F17C2205/0338 ,  F17C2205/0385 ,  F17C2205/0391

Abstract: Fluid dispensing assemblies are disclosed, for use in fluid supply packages in which such fluid dispensing assemblies as coupled to fluid supply vessels, for dispensing of fluids such as semiconductor manufacturing fluids. The fluid dispensing assemblies in specific implementations are configured to prevent application of excessive force to valve elements in the fluid dispensing assemblies, and/or for avoiding inadvertent or accidental open conditions of vessels that may result in leakage of toxic or otherwise hazardous or valuable gas. Also described are alignment devices for assisting coupling of coupling elements, e.g., coupling elements of fluid supply packages of the foregoing type, so that damage to such couplings as a result of misalignment is avoided.