公开(公告)号：US12068735B2

公开(公告)日：2024-08-20

申请号：US17193492

申请日：2021-03-05

Applicant: EPISTAR CORPORATION

Inventor： Ta-Cheng Hsu ,  Wei-Shou Chen ,  Chung-Jen Chung ,  Chia-Min Chang

IPC: H03H9/02 ,  H03H3/02 ,  H03H9/05

CPC classification number: H03H9/02015 ,  H03H3/02 ,  H03H9/0514

Abstract: An acoustic wave device, includes piezoelectric layer having an upper piezoelectric surface and a lower piezoelectric surface; an upper electrode formed on the upper piezoelectric surface; a lower electrode; a support layer including a non-monocrystalline insulating material; and a lower cover, wherein the lower electrode and the support layer formed between the lower cover and the lower piezoelectric surface.