公开(公告)号：US20140231318A1

公开(公告)日：2014-08-21

申请号：US14265043

申请日：2014-04-29

Applicant: Entegris, Inc.

Inventor： James Cedrone ,  George Gonnella ,  Iraj Gashgaee ,  Ralph J. Stankowski

IPC: B01D35/30

CPC classification number: B01D35/30 ,  B01D24/38 ,  B01D24/383 ,  B01D24/42 ,  B01D24/4876 ,  B01D29/39 ,  B01D29/43 ,  B01D35/02 ,  B01D39/2075 ,  F04B15/02 ,  F04B25/00 ,  F04B25/005 ,  F04B39/16 ,  F04B49/065 ,  F04B53/20 ,  F04B2205/14 ,  Y10T137/87885

Abstract: Embodiments described herein provide systems and methods for high viscosity pumps including a noncompliant filter. One embodiment can include a multi-stage pump comprising an pump inlet flow path, a pump outlet flow path, a feed stage in fluid communication with the pump inlet flow path, a dispense stage in fluid communication with the feed stage and the pump outlet flow path, a noncompliant disposable filter for high viscosity fluid in a flow path between the feed stage and the dispense stage and a set of valves to selectively allow fluid flow through the multi-stage pump.

Abstract translation: 本文描述的实施例提供了包括不合格过滤器的高粘度泵的系统和方法。 一个实施例可以包括多级泵，其包括泵入口流动路径，泵出口流动路径，与泵入口流动路径流体连通的进料级，与进料级流体连通的分配级和泵出口流 路径，用于进料级和分配级之间的流动路径中的高粘度流体的不合规的一次性过滤器和一组选择性地允许流体流过多级泵的阀。