公开(公告)号：US20190172680A1

公开(公告)日：2019-06-06

申请号：US16260913

申请日：2019-01-29

Applicant: FEI COMPANY

Inventor： Scott Edward FULLER ,  Jason DONALD ,  Termsupt SEEMUNTCHAIBOWORN

IPC: H01J37/317 ,  H01J37/304 ,  H01J37/305 ,  H01J37/22 ,  H01J37/28 ,  H01J37/30

CPC classification number: H01J37/317 ,  H01J37/22 ,  H01J37/28 ,  H01J37/3005 ,  H01J37/304 ,  H01J37/3056 ,  H01J2237/08 ,  H01J2237/24578 ,  H01J2237/2814 ,  H01J2237/30466 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: To expose a desired feature, focused ion beam milling of thin slices from a cross section alternate with forming a scanning electron image of each newly exposed cross section. Milling is stopped when automatic analysis of an electron beam image of the newly exposed cross section shows that a predetermined criterion is met.