公开(公告)号：US20210183608A1

公开(公告)日：2021-06-17

申请号：US16717043

申请日：2019-12-17

Applicant: FEI Company

Inventor： Kun LIU ,  Gregory A. SCHWIND ,  Sean KELLOGG ,  Jorge FILEVICH

IPC: H01J27/24

Abstract: Apparatuses and methods for an optical induced ion source are disclosed herein. An example apparatus at least includes an ionization volume arranged to receive a gas and first optical energy, the first optical energy to ionize the gas, and a channel formed between a first membrane and a second membrane, the first membrane having at least a transparent portion and the second membrane including an aperture, where the gas is provided to the ionization volume through the channel, the ionization volume formed inside the channel and adjacent to the aperture, and where the first optical energy ionizes the gas after passing through the at least transparent portion of the first membrane.