公开(公告)号：US20240021407A1

公开(公告)日：2024-01-18

申请号：US18354524

申请日：2023-07-18

Applicant: FEI Company

Inventor： Marcus STRAW ,  Dmitry GRINFELD ,  Alexander MAKAROV ,  Alan BAHM ,  Aaron TOROK ,  Kun LIU ,  Joseph CHRISTIAN ,  Josh GILBERT ,  Tom NICHOLS ,  Jeff KOSMOSKI

IPC: H01J37/295 ,  H01J37/20 ,  H01J49/42

CPC classification number: H01J37/295 ,  H01J37/20 ,  H01J49/4215

Abstract: Systems and method for the preparation and delivery of biological samples for charged particle analysis are disclosed herein. An example system at least includes an ion filter coupled to select a sample ion from an ionized sample supply, the ion filter including a quadrupole filter to select the sample ion from the sample supply, an energy reduction cell coupled to receive the selected sample ion and reduce a kinetic energy of the sample ion, a validation unit coupled to receive the sample ion and determine whether the sample ion is a target sample ion, a substrate coupled to receive the sample, wherein the substrate is electron transparent, an ion transport module coupled to receive the sample ion from the ion filter and transport the sample ion to the substrate, and an imaging system arranged to image, with a low energy charged particle beam, the sample located on the substrate, wherein the substrate is arranged in an analysis location. The imaging system including a charge particle emitter coupled to direct coherent charged particles toward the sample; and a detector arranged to detect interference patterns formed from interaction of the coherent charged particles and the sample.

公开(公告)号：US20210183608A1

公开(公告)日：2021-06-17

申请号：US16717043

申请日：2019-12-17

Applicant: FEI Company

Inventor： Kun LIU ,  Gregory A. SCHWIND ,  Sean KELLOGG ,  Jorge FILEVICH

IPC: H01J27/24

Abstract: Apparatuses and methods for an optical induced ion source are disclosed herein. An example apparatus at least includes an ionization volume arranged to receive a gas and first optical energy, the first optical energy to ionize the gas, and a channel formed between a first membrane and a second membrane, the first membrane having at least a transparent portion and the second membrane including an aperture, where the gas is provided to the ionization volume through the channel, the ionization volume formed inside the channel and adjacent to the aperture, and where the first optical energy ionizes the gas after passing through the at least transparent portion of the first membrane.