公开(公告)号：US20210183608A1

公开(公告)日：2021-06-17

申请号：US16717043

申请日：2019-12-17

Applicant: FEI Company

Inventor： Kun LIU ,  Gregory A. SCHWIND ,  Sean KELLOGG ,  Jorge FILEVICH

IPC: H01J27/24

Abstract: Apparatuses and methods for an optical induced ion source are disclosed herein. An example apparatus at least includes an ionization volume arranged to receive a gas and first optical energy, the first optical energy to ionize the gas, and a channel formed between a first membrane and a second membrane, the first membrane having at least a transparent portion and the second membrane including an aperture, where the gas is provided to the ionization volume through the channel, the ionization volume formed inside the channel and adjacent to the aperture, and where the first optical energy ionizes the gas after passing through the at least transparent portion of the first membrane.

公开(公告)号：US20250159789A1

公开(公告)日：2025-05-15

申请号：US18723281

申请日：2021-12-21

Applicant: Sean KELLOGG ,  Hans-Juergen SCHLUETER ,  Patrick LANCUBA ,  FEI Company ,  Thermo Fisher Scientific (Bremen) GmbH ,  Thermo Fisher Scientific (Ecublens) SARL

Inventor： Sean KELLOGG ,  Hans-Juergen SCHLUETER ,  Patrick LANCUBA

IPC: H05H1/00 ,  G01N21/67 ,  H01J49/00 ,  H01J49/10

Abstract: A system and method for spectrometry of a sample in a plasma is described. The system includes a split ring resonator, an electrode, and a delivery system. The split ring resonator has a discharge gap, and the electrode is arranged in proximity to, but spaced apart from, the discharge gap such that. When a sufficient power is supplied to a plasma generated in the discharge gap, the plasma extends towards and couples with the electrode, so that the plasma is established in a region between the discharge gap and the electrode. The delivery system is for introduction of a sample into the plasma established in the region between the discharge gap and the electrode. The system is configured to direct an output from the plasma to a spectrometer for analysis.

公开(公告)号：US20240284581A1

公开(公告)日：2024-08-22

申请号：US18571695

申请日：2023-05-09

Applicant: Thermo Fisher Scientific (Ecublens) SARL ,  c/o FEI Company

Inventor： Patrick LANCUBA ,  Sean KELLOGG

IPC: H05H1/16 ,  G01N21/73 ,  H05H1/54

CPC classification number: H05H1/16 ,  G01N21/73 ,  H05H1/54

Abstract: An apparatus for plasma control is disclosed. The apparatus comprises: a plasma generator comprising two electrodes, an anode and a cathode, configured to produce a plasma between the two electrodes; a solenoid coil disposed to surround the plasma and configured to produce a magnetic field parallel to a longitudinal axis between the two electrodes; and circuitry configured for allowing independent timing of the magnetic field with respect to the production of the plasma. A method for plasma control in a spectroscopy system and an optical emission spectrometer using said method are also disclosed.