公开(公告)号：US20140110597A1

公开(公告)日：2014-04-24

申请号：US14060170

申请日：2013-10-22

Applicant: FEI Company

Inventor： Lubomir Tuma ,  Josef Sesták

IPC: G21K5/08

CPC classification number: G21K5/08 ,  H01J37/1413 ,  H01J37/20 ,  H01J37/265 ,  H01J2237/1035 ,  H01J2237/1415 ,  H01J2237/2802 ,  H01J2237/2813

Abstract: The invention relates to a charged-particle apparatus having a charged particle source with an optical axis; a magnetic immersion lens comprising a first lens pole and a configurable magnetic circuit; and a first sample stage movable with respect to the optical axis. The apparatus has a first configuration to position the sample, mounted on the first stage, with respect to the optical axis and a second configuration, having a second lens pole mounted on the first stage and intersecting the optical axis, equipped with a second sample stage to position the sample between the two lens poles and is movable with respect to the optical axis, causing the optical properties of the magnetic immersion lens to differ in the two configurations, and can, in the second configuration, be changed by positioning the second lens pole using the first stage, thus changing the magnetic circuit.

Abstract translation: 本发明涉及具有光轴的带电粒子源的带电粒子装置; 一种包含第一透镜柱和可配置磁路的磁浸透镜; 以及可相对于光轴移动的第一样品台。 该装置具有第一配置，用于相对于光轴定位安装在第一台上的样品，并且具有第二配置，其具有安装在第一台上并与光轴相交的第二透镜杆，该第二透镜杆装备有第二样品台 将样品定位在两个透镜杆之间并且可相对于光轴移动，导致两种结构中的浸没透镜的光学特性不同，并且可以在第二构造中通过将第二透镜 使用第一级，从而改变磁路。