公开(公告)号：US11969752B2

公开(公告)日：2024-04-30

申请号：US17555289

申请日：2021-12-17

Applicant: FENG CHIA UNIVERSITY

Inventor： Ping-Yen Hsieh ,  Xuan-Xuan Chang ,  Ying-Hung Chen ,  Chu-Liang Ho

IPC: B05D1/00 ,  C08G61/02 ,  H01J37/32

CPC classification number: B05D1/62 ,  C08G61/025 ,  H01J37/32027 ,  H01J37/32137 ,  H01J37/32449 ,  H01J37/32568 ,  B05D2201/02 ,  B05D2202/00 ,  B05D2518/00 ,  C08G2261/1412 ,  C08G2261/44

Abstract: The present invention discloses an organic polymer film and a manufacturing method thereof. The organic polymer film is mainly manufactured by the following steps. Firstly, the step (A) provides a xylene precursor and a substrate, and the step (B) places the substrate inside of a plasma equipment. After that, the step (C) evacuates the plasma equipment while introducing a carrier gas which carries vapor of the xylene precursor, and the step (D) turns on a pulse power supply system of the plasma equipment, generating a short pulse for plasma ignition. Finally, the step (E) forms the organic polymer film on the substrate. In the aforementioned steps, the frequency of the short pulse plasma is between 1 Hz˜10,000 Hz, and the pulse period of the short pulse plasma is between 1 μs˜60 μs.