公开(公告)号：US20240387643A1

公开(公告)日：2024-11-21

申请号：US18787102

申请日：2024-07-29

Applicant: FLOSFIA INC.

Inventor： Mutsumi OKA ,  Atsushi TERAI ,  Hidetaka SHIBATA

IPC: H01L29/24 ,  H01L29/04 ,  H01L29/872

Abstract: Provided a multilayer structure including at least: a semiconductor layer containing a crystalline oxide semiconductor as a major component; and a conductive substrate layered on the semiconductor layer, wherein the multilayer structure has a first direction in a plane perpendicular to a layering direction of the multilayer structure and a second direction perpendicular or substantially perpendicular to the first direction, and a first coefficient of linear expansion being a coefficient of linear expansion in the first direction of the conductive substrate is smaller than a second coefficient of linear expansion being a coefficient of linear expansion in the second direction of the conductive substrate, and a third coefficient of linear expansion being a coefficient of linear expansion in the first direction of the semiconductor layer is smaller than a fourth coefficient of linear expansion being a coefficient of linear expansion in the second direction of the semiconductor layer.

公开(公告)号：US20240387319A1

公开(公告)日：2024-11-21

申请号：US18787094

申请日：2024-07-29

Applicant: FLOSFIA INC.

Inventor： Mutsumi OKA ,  Atsushi TERAI ,  Hidetaka SHIBATA

IPC: H01L23/373 ,  H01L23/00 ,  H01L29/24

Abstract: Provided is a multilayer structure including at least: a semiconductor layer containing a crystalline oxide semiconductor as a major component; and a conductive substrate layered on the semiconductor layer, wherein the conductive substrate includes at least a first metal and a second metal different from the first metal, the conductive substrate has a first direction and a second direction perpendicular or substantially perpendicular to the first direction in a plane, and a first coefficient of linear expansion being a coefficient of linear expansion in the first direction of the conductive substrate and a second coefficient of linear expansion being a coefficient of linear expansion in the second direction are identical or substantially identical.