公开(公告)号：US10393618B2

公开(公告)日：2019-08-27

申请号：US15189892

申请日：2016-06-22

Applicant: FREESCALE SEMICONDUCTOR INC.

Inventor： Peter T. Jones ,  Arvind Salian ,  William D. McWhorter ,  Chad Krueger ,  John Shipman ,  Michael Naumann ,  Larry D. Metzler ,  Tripti Regmi

IPC: G01M7/08 ,  B81C99/00

Abstract: Methods and apparatuses are provided for evaluating or testing stiction in Microelectromechanical Systems (MEMS) devices utilizing a mechanized shock pulse generation approach. In one embodiment, the method includes the step or process of loading a MEMS device, such as a multi-axis MEMS accelerometer, into a socket provided on a Device-Under-Test (DUT) board. After loading the MEMS device into the socket, a series of controlled shock pulses is generated and transmitted through the MEMS device utilizing a mechanized test apparatus. The mechanized test apparatus may, for example, repeatedly move the DUT board over a predefined motion path to generate the controlled shock pulses. In certain cases, transverse vibrations may also be directed through the tested MEMS device in conjunction with the shock pulses. An output of the MEMS device is then monitored to determine whether stiction of the MEMS device occurs during each of the series of controlled shock pulses.

公开(公告)号：US09612254B2

公开(公告)日：2017-04-04

申请号：US14318199

申请日：2014-06-27

Applicant: Freescale Semiconductor, Inc.

Inventor： Michael Naumann

IPC: G01P15/125 ,  B81B7/00 ,  B81C1/00 ,  G01P15/08

CPC classification number: G01P15/125 ,  B81B7/007 ,  B81B2207/095 ,  B81C1/00365 ,  B81C2201/0197 ,  B81C2203/0136 ,  G01P2015/0814

Abstract: Microelectromechanical system (MEMS) devices and methods for forming MEMS devices are provided. The MEMS devices include a substrate, an anchored structure fixedly coupled to the substrate, and a movable structure resiliently coupled to the substrate. The movable structure has an opening formed therethrough and is positioned such that the anchored structure is at least partially within the opening and is in a capacitor-forming relationship with the movable structure. The movable structure comprises a movable structure finger extending only partially across the opening.

公开(公告)号：US09846097B2

公开(公告)日：2017-12-19

申请号：US14931557

申请日：2015-11-03

Applicant: FREESCALE SEMICONDUCTOR, INC.

Inventor： Michael Naumann

IPC: G01L9/12 ,  G01L9/00

CPC classification number: G01L9/0072 ,  G01L9/12

Abstract: A sensor device includes a substrate having a port extending through it and a membrane including a first electrode spanning across the port. The port exposes the membrane to a pressure stimulus from an external environment. A second electrode is spaced apart from the first electrode by a gap having a first width. A control circuit applies an actuation voltage to move the second electrode closer to the first electrode and change the gap to a second width that is less than the first width. When the gap is set to the second width, the pressure sensor exhibits a greater sensitivity then when the gap is set to the first width. The membrane with the first electrode is movable in response to the pressure stimulus and the pressure stimulus is sensed as movement of the first electrode relative to the second electrode while the actuation voltage is applied.

公开(公告)号：US10126129B2

公开(公告)日：2018-11-13

申请号：US15207229

申请日：2016-07-11

Applicant: FREESCALE SEMICONDUCTOR, INC.

Inventor： Michael Naumann

IPC: G01C19/5733 ,  G01C19/5719 ,  G01C19/5747

Abstract: A MEMS device includes a movable mass having a central region overlying a sense electrode and an opening in which a suspension structure and spring system are located. The suspension structure includes an anchor coupled to a substrate and rigid links extending from opposing sides of the anchor. The spring system includes a first and second spring heads coupled to each of the rigid links. A first drive spring is coupled to the first spring head and to the movable mass, and a second drive spring is coupled to the second spring head and to the movable mass. The movable mass is resiliently suspended above the surface of the substrate via the suspension structure and the spring system. The spring system enables drive motion of the movable mass in the drive direction and sense motion of the movable mass in a sense direction perpendicular to the surface of the substrate.

公开(公告)号：US10031156B2

公开(公告)日：2018-07-24

申请号：US14493890

申请日：2014-09-23

Applicant: Freescale Semiconductor, Inc.

Inventor： Michael Naumann

IPC: G01P15/125 ,  B81B3/00 ,  G01P15/18 ,  G01P15/08

Abstract: The embodiments described herein provide microelectromechanical systems (MEMS) devices, such as three-axis MEMS devices that can sense acceleration in three orthogonal axes (e.g., x-axis, y-axis, and z-axis). In general, the embodiments described can provide decoupling between the sense motions of all three axes from each other. This decoupling is facilitated by the use of an inner frame, and an outer frame, and the use of rotative spring elements combined with translatory spring elements that have asymmetric stiffness. Specifically, the translatory spring elements facilitate translatory motion in two directions (e.g., the x-direction and y-direction) and have an asymmetric stiffness configured to compensate for an asymmetric mass used to sense in the third direction (e.g., the z-direction).

公开(公告)号：US20180010913A1

公开(公告)日：2018-01-11

申请号：US15207229

申请日：2016-07-11

Applicant: FREESCALE SEMICONDUCTOR, INC.

Inventor： Michael Naumann

IPC: G01C19/5719

CPC classification number: G01C19/5719 ,  G01C19/5747

Abstract: A MEMS device includes a movable mass having a central region overlying a sense electrode and an opening in which a suspension structure and spring system are located. The suspension structure includes an anchor coupled to a substrate and rigid links extending from opposing sides of the anchor. The spring system includes a first and second spring heads coupled to each of the rigid links. A first drive spring is coupled to the first spring head and to the movable mass, and a second drive spring is coupled to the second spring head and to the movable mass. The movable mass is resiliently suspended above the surface of the substrate via the suspension structure and the spring system. The spring system enables drive motion of the movable mass in the drive direction and sense motion of the movable mass in a sense direction perpendicular to the surface of the substrate.

公开(公告)号：US09562825B2

公开(公告)日：2017-02-07

申请号：US14535960

申请日：2014-11-07

Applicant: FREESCALE SEMICONDUCTOR, INC.

Inventor： Michael Naumann

IPC: G01M7/06 ,  G01P15/08 ,  G01P15/06 ,  G01P15/03 ,  G01M7/08

CPC classification number: G01M7/08 ,  G01P15/03 ,  G01P15/036 ,  G01P15/06 ,  G01P15/0891

Abstract: A micromechanical shock sensor includes a proof mass coupled to a surface of a substrate and a projection element extending laterally from the proof mass. The shock sensor further includes a latch mechanism and a retention anchor. The latch mechanism has a latch spring attached to the surface and a latch tip extending from a movable end of the latch spring. The retention anchor is attached to the surface and is located proximate the latch tip. The proof mass is configured for planar movement relative to the substrate when the proof mass is subjected to a force of at least a threshold magnitude. Movement of the proof mass in response to the force causes the latch tip to become retained between the projection element and the retention anchor to place the shock sensor in a latched state. The latched state may be detected by optical inspection, probe, or external readout.

Abstract translation: 微机械式震动传感器包括耦合到基板的表面的检测质量和从检验质量块横向延伸的突出元件。 冲击传感器还包括闩锁机构和保持锚。 闩锁机构具有附接到表面的闩锁弹簧和从闩锁弹簧的可动端延伸的闩锁尖端。 保持锚附接到表面并且位于闩锁尖端附近。 当证明质量体经受至少阈值大小的力时，检验质量块构造成相对于衬底的平面运动。 响应于力的运动证明质量使得闩锁尖端保持在突出元件和保持锚固件之间，以将冲击传感器置于锁定状态。 锁定状态可以通过光学检查，探头或外部读出来检测。

公开(公告)号：US09360496B2

公开(公告)日：2016-06-07

申请号：US14506022

申请日：2014-10-03

Applicant: FREESCALE SEMICONDUCTOR, INC.

Inventor： Michael Naumann

IPC: G01C19/00 ,  G01P15/125 ,  B81B3/00

CPC classification number: G01P15/125 ,  B81B3/0021 ,  B81B3/007 ,  B81B2201/0235 ,  G01P15/18 ,  G01P2015/0845

Abstract: A microelectromechanical systems (MEMS) device, such as a three-axis MEMS device can sense acceleration in three orthogonal axes. The MEMS device includes a single proof mass and suspension spring systems that movably couple the proof mass to a substrate. The suspension spring systems include translatory spring elements and torsion spring elements. The translatory spring elements enable translatory motion of the proof mass relative to the substrate in two orthogonal directions that are parallel to the plane of the MEMS device in order to sense forces in the two orthogonal directions. The torsion spring elements enable rotation of the proof mass about a rotational axis in order to sense force in a third direction that is orthogonal to the other two directions. The translatory spring elements have asymmetric stiffness configured to compensate for an asymmetric mass of the movable element used to sense in the third direction.

Abstract translation: 诸如三轴MEMS器件的微机电系统（MEMS）装置可以感测三个正交轴中的加速度。 MEMS器件包括将校准质量块可移动地耦合到衬底的单个校准质量块和悬架弹簧系统。 悬架弹簧系统包括平移弹簧元件和扭转弹簧元件。 平移弹簧元件使平行于MEMS器件的平面的两个正交方向上的校准质量体能够相对于衬底的平移运动，以便在两个正交方向上感测力。 扭转弹簧元件使得证明块绕旋转轴线旋转，以便在与其它两个方向正交的第三方向上感测力。 平移弹簧元件具有非对称刚度，其被配置为补偿用于在第三方向上感测的可移动元件的不对称质量。

公开(公告)号：US09335170B2

公开(公告)日：2016-05-10

申请号：US13687299

申请日：2012-11-28

Applicant: FREESCALE SEMICONDUCTOR, INC.

Inventor： Yizhen Lin ,  Jan Mehner ,  Michael Naumann

IPC: G01C19/00 ,  G01C19/574

CPC classification number: G01C19/574

Abstract: An inertial sensor (110) includes a drive system (118) configured to oscillate a drive mass (114) within a plane (24) that is substantially parallel to a surface (50) of a substrate (28). The drive system (118) includes first and second drive units (120, 122) having fixed fingers (134, 136) interleaved with movable fingers (130, 132) of the drive mass (114). At least one of the drive units (120) is located on each side (126, 128) of the drive mass (114). Likewise, at least one of the drive units (122) is located on each side (126, 128) of the drive mass (114). The drive units (122) are driven in phase opposition to the drive units (120) so that a levitation force (104) generated by the drive units (122) compensates for, or at least partially suppresses, a levitation force (100) generated by the drive units (120).

Abstract translation: 惯性传感器（110）包括驱动系统（118），驱动系统（118）被配置为使基本平行于基底（28）的表面（50）的平面（24）内的驱动质量块（114）振荡。 驱动系统（118）包括具有与驱动质量块（114）的活动指状物（130,132）交错的固定指状物（134,136）的第一和第二驱动单元（120,122）。 驱动单元（120）中的至少一个位于驱动块（114）的每一侧（126,128）上。 类似地，驱动单元（122）中的至少一个位于驱动块（114）的每一侧（126,128）上。 驱动单元（122）与驱动单元（120）相反地驱动，使得由驱动单元（122）产生的悬浮力（104）补偿或至少部分地抑制产生的悬浮力（100） 通过驱动单元（120）。

公开(公告)号：US20150268269A1

公开(公告)日：2015-09-24

申请号：US14221016

申请日：2014-03-20

Applicant: FREESCALE SEMICONDUCTOR, INC.

Inventor： Kemiao Jia ,  Andrew C. McNeil ,  Michael Naumann

IPC: G01P15/125 ,  B81B3/00

CPC classification number: G01P15/125 ,  G01P15/18

Abstract: A MEMS sensor includes a movable element spaced apart from a surface of a substrate and fixed sense elements attached to the substrate, where all of the fixed sense elements are oriented parallel to one another. The movable element includes movable sense elements adjacent to the fixed sense elements. The movable element is adapted to undergo motion in response to mutually orthogonal forces, each of the forces being substantially parallel to the surface of the substrate. The fixed sense elements detect the motion of the movable element, and differential logic is applied to determine the magnitudes of the mutually orthogonal forces.

Abstract translation: MEMS传感器包括与衬底的表面间隔开的可移动元件和附接到衬底的固定感测元件，其中所有固定感测元件彼此平行定向。 可移动元件包括与固定感测元件相邻的可移动感测元件。 可移动元件适于响应于相互正交的力而进行运动，每个力基本上平行于衬底的表面。 固定感测元件检测可移动元件的运动，并且应用差分逻辑来确定相互正交的力的大小。