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公开(公告)号：US09711934B2
公开(公告)日：2017-07-18
申请号：US15145251
申请日：2016-05-03
Applicant: GIGAPHOTON INC.
Inventor： Osamu Wakabayashi , Takashi Matsunaga
CPC classification number: H01S3/1305 , H01S3/005 , H01S3/0071 , H01S3/0092 , H01S3/08009 , H01S3/10092 , H01S3/139 , H01S3/1625 , H01S3/225 , H01S3/2308 , H01S3/2375
Abstract: A laser apparatus may include a first laser resonator configured to generate a laser beam, a first optical element configured to adjust a divergence in a first direction of the laser beam, a second optical element configured to adjust a divergence in a second direction of the laser beam, a measuring unit configured to measure the divergence in the first direction and the divergence in the second direction of the laser beam, and a controller configured to control one or both of the first optical element and the second optical element based on the divergence in the first direction and the divergence in the second direction of the laser beam both measured by the measuring unit.
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公开(公告)号：US09490603B2
公开(公告)日：2016-11-08
申请号：US14638883
申请日：2015-03-04
Applicant: GIGAPHOTON INC.
Inventor： Hiroaki Tsushima , Osamu Wakabayashi , Takahito Kumazaki , Takashi Matsunaga
IPC: H01S3/00 , H01S3/134 , G01J11/00 , H01S3/034 , H01S3/038 , H01S3/08 , H01S3/0971 , H01S3/225 , H01S3/23 , H01S3/10
CPC classification number: H01S3/0014 , G01J1/4257 , G01J11/00 , H01S3/005 , H01S3/034 , H01S3/038 , H01S3/08009 , H01S3/0971 , H01S3/10069 , H01S3/134 , H01S3/225 , H01S3/2251 , H01S3/2256 , H01S3/2308
Abstract: A laser apparatus may comprise: a laser chamber configured to include a laser gain medium; a pair of electrodes disposed in the laser chamber; an energy detector configured to measure pulse energy of laser beams outputted by discharging between the pair of the electrodes; an optical element disposed on a light path of the laser beams; and a controller configured to calculate an integration value of absorption energy at the optical element, and determine whether the integration value exceeds a lifetime integration value of the optical element based on the pulse energy of the laser beams.
Abstract translation: 激光装置可以包括：激光室，被配置为包括激光增益介质; 设置在激光室中的一对电极; 能量检测器，被配置为测量在所述一对电极之间通过放电而输出的激光束的脉冲能量; 设置在激光束的光路上的光学元件; 以及控制器，其被配置为计算所述光学元件处的吸收能的积分值，并且基于所述激光束的脉冲能量来确定所述积分值是否超过所述光学元件的寿命积分值。
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公开(公告)号：US09059554B2
公开(公告)日：2015-06-16
申请号：US14049383
申请日：2013-10-09
Applicant: Gigaphoton Inc.
Inventor： Akihiko Kurosu , Junichi Fujimoto , Yosuke Ishizuka , Takashi Matsunaga , Osamu Wakabayashi
CPC classification number: H01S3/036 , F16C32/047 , H01S3/02 , H01S3/041 , H01S3/223 , H01S3/2232 , H01S3/2258
Abstract: A discharge-pumped gas laser device may include a laser chamber, a pair of discharge electrodes provided in the laser chamber, a fan with a magnetic bearing being provided in the laser chamber and configured to be capable of circulating a gas in the laser chamber, a housing configured to contain the laser chamber, and a magnetic bearing controller connected to the magnetic bearing electrically, being capable of controlling the magnetic bearing, and provided in the housing separately from the laser chamber.
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公开(公告)号：US09742141B2
公开(公告)日：2017-08-22
申请号：US15245245
申请日：2016-08-24
Applicant: Gigaphoton Inc.
Inventor： Hiroaki Tsushima , Kouji Kakizaki , Takashi Matsunaga , Takeshi Asayama , Hisakazu Katsuumi , Hiroshi Umeda , Hiroyuki Ikeda
IPC: H01S3/22 , H01S3/036 , H01S3/038 , H01S3/041 , H01S3/04 , H01S3/225 , H01S3/08 , H01S3/097 , H01S3/0971 , H01S3/134
CPC classification number: H01S3/036 , H01S3/038 , H01S3/0384 , H01S3/0407 , H01S3/041 , H01S3/08004 , H01S3/08009 , H01S3/09702 , H01S3/09713 , H01S3/134 , H01S3/225
Abstract: A laser chamber including a first space and a second space in communication with the first space may include: a first discharge electrode disposed in the first space; a second discharge electrode disposed in the first space to face the first discharge electrode; a fan disposed in the first space and configured to flow laser gas between the first discharge electrode and the second discharge electrode; a peaking condenser disposed in the second space; and an electrical insulating member configured to partition the first space and the second space from one another, and disposed to allow the laser gas to pass through between the first space and the second space.
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5.发明授权公开(公告)号：US09507248B2
公开(公告)日：2016-11-29
申请号：US13681744
申请日：2012-11-20
Applicant: Gigaphoton Inc.
Inventor： Shinji Okazaki , Hakaru Mizoguchi , Junichi Fujimoto , Takashi Matsunaga , Kouji Kakizaki , Osamu Wakabayashi
CPC classification number: G03B27/522 , G03F7/70408
Abstract: A two-beam interference apparatus may include a wafer stage on which a wafer may be set, a beam splitter to split first laser light into second and third laser light having a beam intensity distribution elongated in a first direction within a surface of the wafer, and an optical system to guide the second and third laser light onto the wafer. The wafer is irradiated with the second laser light from a second direction perpendicular to the first direction, and the third laser light from a third direction perpendicular to the first direction but different from the second direction, to thereby cause interference of the second and third laser light on the wafer. This apparatus increases the accuracy of the two-beam interference exposure.
Abstract translation: 双光束干涉装置可以包括其上可以设置晶片的晶片台，分束器，用于将第一激光分离成具有沿晶片表面内的第一方向延伸的光束强度分布的第二和第三激光， 以及将第二和第三激光引导到晶片上的光学系统。 从垂直于第一方向的第二方向照射第二激光，从与第一方向垂直但与第二方向不同的第三方向照射第三激光，从而引起第二和第三激光的干涉 光在晶圆上。 该装置增加了双光束干涉曝光的精度。
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Patent Agency Ranking
公开(公告)号：US09225139B2
公开(公告)日：2015-12-29
申请号：US14531876
申请日：2014-11-03
Applicant: Gigaphoton Inc.
Inventor： Akihiko Kurosu , Junichi Fujimoto , Yosuke Ishizuka , Takashi Matsunaga , Osamu Wakabayashi
CPC classification number: H01S3/036 , F16C32/047 , H01S3/02 , H01S3/041 , H01S3/223 , H01S3/2232 , H01S3/2258
Abstract: A discharge-pumped gas laser device may include a laser chamber, a pair of discharge electrodes provided in the laser chamber, a fan with a magnetic bearing being provided in the laser chamber and configured to be capable of circulating a gas in the laser chamber, a housing configured to contain the laser chamber, and a magnetic bearing controller connected to the magnetic bearing electrically, being capable of controlling the magnetic bearing, and provided in the housing separately from the laser chamber.
Abstract translation: 放电泵浦气体激光装置可以包括激光室，设置在激光室中的一对放电电极，具有磁性轴承的风扇设置在激光室中并且能够使激光室中的气体循环， 被配置为容纳激光室的壳体，以及与磁性轴承电连接的磁性轴承控制器，其能够控制磁性轴承，并且与激光室分开设置在壳体中。
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公开(公告)号：US10164396B2
公开(公告)日：2018-12-25
申请号：US15720122
申请日：2017-09-29
Applicant: GIGAPHOTON INC.
Inventor： Akihiko Kurosu , Takashi Matsunaga , Hiroyuki Masuda , Osamu Wakabayashi , Hiroaki Tsushima , Masanori Yashiro , Takeshi Ohta
IPC: H01S3/036 , H01S3/097 , H01S3/0971 , H01S3/104 , H01S3/04 , H01S3/03 , H01S3/08 , H01S3/134 , H01S3/13 , H01S3/225 , H01S3/041
Abstract: There may be provided a laser unit including a display configured to display one or both of electric power consumed by the laser unit and electric energy consumed by the laser unit.
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公开(公告)号：US09825417B2
公开(公告)日：2017-11-21
申请号：US15144081
申请日：2016-05-02
Applicant: GIGAPHOTON INC.
Inventor： Akihiko Kurosu , Takashi Matsunaga , Hiroyuki Masuda , Osamu Wakabayashi , Hiroaki Tsushima , Masanori Yashiro , Takeshi Ohta
IPC: H01S3/036 , H01S3/097 , H01S3/0971 , H01S3/104 , H01S3/04 , H01S3/03 , H01S3/08 , H01S3/134 , H01S3/13 , H01S3/225 , H01S3/041
CPC classification number: H01S3/036 , H01S3/03 , H01S3/0404 , H01S3/0407 , H01S3/041 , H01S3/08009 , H01S3/08031 , H01S3/09702 , H01S3/0971 , H01S3/104 , H01S3/1306 , H01S3/134 , H01S3/2258
Abstract: There may be provided a laser unit including a display configured to display one or both of electric power consumed by the laser unit and electric energy consumed by the laser unit.
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公开(公告)号：US09647411B2
公开(公告)日：2017-05-09
申请号：US14818939
申请日：2015-08-05
Applicant: Gigaphoton Inc.
Inventor： Takashi Matsunaga , Takahito Kumazaki , Osamu Wakabayashi
CPC classification number: H01S3/08004 , H01S3/1305 , H01S3/137 , H01S3/2251 , H01S3/2256 , H01S3/2366
Abstract: There is provided a method of controlling the wavelength of a laser beam. The method includes measuring an absolute wavelength of the laser beam; calculating a difference between a reference wavelength and the absolute wavelength of the laser beam; and adjusting the reference wavelength of the laser beam based on the difference between the reference wavelength and the absolute wavelength of the laser beam, at an interval shorter than an interval for which the absolute wavelength of the laser beam is measured.
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公开(公告)号：US09130338B2
公开(公告)日：2015-09-08
申请号：US13738028
申请日：2013-01-10
Applicant: Gigaphoton Inc.
Inventor： Takahito Kumazaki , Takashi Matsunaga , Kazuya Takezawa
CPC classification number: H01S3/04 , G02B7/008 , H01S3/0401 , H01S3/08004 , H01S3/08009 , H01S3/08036 , H01S3/106 , H01S3/225 , H01S3/2333
Abstract: An excimer laser may include a frame, a base plate on which the frame is disposed, an excimer laser configured to oscillate and output laser light by discharge-pumping within a chamber containing a laser gas, an optical element that is mounted upon the frame and that is disposed in the optical path of the outputted laser light and a heat removal mechanism connected to both the frame and the base plate.
Abstract translation: 准分子激光器可以包括框架，设置框架的基板，被配置为通过在包含激光气体的腔室内的放电泵送来振荡和输出激光的准分子激光器，安装在框架上的光学元件和 其设置在输出的激光的光路中，以及连接到框架和底板的散热机构。
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