公开(公告)号：US11211357B2

公开(公告)日：2021-12-28

申请号：US17037909

申请日：2020-09-30

Applicant: GUANGDONG UNIVERSITY OF TECHNOLOGY

Inventor： Yun Chen ,  Shuquan Ding ,  Yunbo He ,  Maoxiang Hou ,  Xin Chen ,  Jian Gao ,  Ni Zhao ,  Lanyu Zhang ,  Zhengping Wang

IPC: H01L23/00 ,  B23K20/00 ,  B23K26/34 ,  B23K37/047 ,  B23K101/32 ,  B23K103/00 ,  B23K103/08 ,  B23K101/38

Abstract: A method for processing an ultra-high density interconnect wire under light source guidance, comprising preparing a photo-thermal response conductive paste, and putting it into an air pressure injector; driving the air pressure injector; the air pressure injector extrudes the photo-thermal response conductive paste, so that the photo-thermal response conductive paste is connected with the first chip to form an interconnection wire; stopping extruding the photo-thermal response conductive paste, and driving the air pressure injector to pull off the interconnection wire; a linear light source emits light and irradiates on the interconnection wire to bend to an upper side of a second chip bonding pad; an extrusion mechanism presses a free end of the interconnection wire on the second chip bonding pad; the first chip and the second chip are subjected to glue dripping encapsulation.

公开(公告)号：US10427936B2

公开(公告)日：2019-10-01

申请号：US16221457

申请日：2018-12-15

Applicant: Guangdong University of Technology

Inventor： Yun Chen ,  Xin Chen ,  Dachuang Shi ,  Jian Gao ,  Zhengping Wang ,  Haidong Yang

IPC: B81C1/00 ,  B82Y40/00 ,  H01L21/306 ,  H01L29/06

Abstract: A method of processing nano- and micro-pores includes washing a substrate and cleaning a surface of the substrate; spin-coating photoresist, exposing the substrate and developing to form the substrate with a pattern; 3. depositing micro-nano metal particles on the surface of the substrate; wherein the micro-nano metal particles are centered on a magnetic core; and the surface of the magnetic core is plated with a metal nano-particle coating composed of a plurality of gold, silver or aluminum nanoparticles; removing the photoresist, and maintaining dot arrays of the micro-nano metal particles; applying laser irradiation and a strong uniform magnetic field on the substrate, so that the substrate is processed to form processed structures; and after the processed structures being formed into nano-/micro-pores with targeted pore size, shape and depth, stopping the laser irradiation and removing the strong uniform magnetic field.