公开(公告)号：US20140336971A1

公开(公告)日：2014-11-13

申请号：US14143723

申请日：2013-12-30

Applicant: GWANGJU INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： Sungho JEONG ,  Jeong Hwan IN ,  Chan Kyu KIM ,  Seokhee LEE ,  Hakjae LEE

IPC: G01N21/71

CPC classification number: G01N21/718 ,  Y02E10/541 ,  Y02E10/543

Abstract: Disclosed herein is a quantitative analyzing method of a copper indium gallium selenide (CIGS) film, the method including: obtaining spectra by irradiating a laser on the plurality of CIGS films having different component compositions, selecting a first spectral line and a second spectral line among the spectra of target elements to be analyzed and obtaining a correlation plot between a measured intensity of the first spectral line and a measured intensity of the second spectral line, correcting the measured intensity of the first spectral line and the measured intensity of the second spectral line using results obtained by curve fitting the correlation plot, obtaining a linear calibration curve using the corrected intensity of the first spectral line and the corrected intensity of the second spectral line; and comparing the linear calibration curve with LIBS analysis of a target sample to be analyzed.

Abstract translation: 本文公开了一种铜铟镓硒（CIGS）膜的定量分析方法，该方法包括：通过在具有不同组成成分的多个CIGS膜上照射激光来获得光谱，选择第一光谱线和第二光谱线 要分析的目标元素的光谱，并且获得第一光谱线的测量强度和第二光谱线的测量强度之间的相关图，校正第一光谱线的测量强度和第二光谱线的测量强度 使用通过曲线拟合相关图获得的结果，使用第一光谱线的校正强度和第二光谱线的校正强度获得线性校准曲线; 并将线性校准曲线与要分析的目标样品的LIBS分析进行比较。

公开(公告)号：US20140327907A1

公开(公告)日：2014-11-06

申请号：US14143911

申请日：2013-12-30

Applicant: GWANGJU INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： Sungho JEONG ,  Chan Kyu KIM ,  Seokhee LEE ,  Jeong Hwan IN ,  Hakjae LEE

IPC: G01J3/443

CPC classification number: G01J3/443 ,  G01N21/718 ,  Y02E10/541 ,  Y02P70/521

Abstract: Disclosed herein is a component quantitative analyzing method depending on a depth of a CIGS film, the method including: generating plasma by irradiating a laser beam on the CIGS film and obtaining spectra generated from the plasma, selecting spectral lines having similar characteristics among spectra of specific elements of the CIGS film, and measuring component composition using a value obtained by summing intensities of the selected spectral lines.

Abstract translation: 本文公开了根据CIGS膜的深度的组分定量分析方法，该方法包括：通过在CIGS膜上照射激光束并获得从等离子体产生的光谱来产生等离子体，选择具有相似特征的光谱线 CIGS膜的元件，以及使用通过对所选光谱线的强度求和而获得的值的测量成分组成。