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1.发明申请公开(公告)号：US20210407700A1
公开(公告)日：2021-12-30
申请号：US17230456
申请日：2021-04-14
Applicant: Gigaphoton Inc.
Inventor： Yoshiyuki Honda , Masayuki Morita
Abstract: An extreme ultraviolet light concentrating mirror may include a substrate, a multilayer reflection film provided on the substrate and configured to reflect extreme ultraviolet light, and a protective film provided on the multilayer reflection film. Here, the protective film may include a mixed film in which a network-forming oxide is mixed with an amorphous titanium oxide, or a mixed film in which two or more amorphous titanium oxide layers and two or more network-forming oxide layers are each alternately laminated.
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2.发明授权公开(公告)号：US11410785B2
公开(公告)日：2022-08-09
申请号：US17230456
申请日：2021-04-14
Applicant: Gigaphoton Inc.
Inventor： Yoshiyuki Honda , Masayuki Morita
Abstract: An extreme ultraviolet light concentrating mirror may include a substrate, a multilayer reflection film provided on the substrate and configured to reflect extreme ultraviolet light, and a protective film provided on the multilayer reflection film. Here, the protective film may include a mixed film in which a network-forming oxide is mixed with an amorphous titanium oxide, or a mixed film in which two or more amorphous titanium oxide layers and two or more network-forming oxide layers are each alternately laminated.
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公开(公告)号：US11409027B2
公开(公告)日：2022-08-09
申请号：US17004473
申请日：2020-08-27
Applicant: Gigaphoton Inc.
Inventor： Masayuki Morita
Abstract: An extreme ultraviolet light condensation mirror may include a reflective surface formed in a concave shape and configured to diffract a laser beam incident from a first focal point and having a wavelength longer than a wavelength of extreme ultraviolet light. The reflective surface may be provided with a plurality of first reflection portions, a plurality of second reflection portions, a plurality of first stepped portions, and a plurality of second stepped portions. The first and second stepped portions may have such heights that the laser beam obtains phases opposite to each other through reflection at the first and second reflection portions adjacent to each other. The height of each first stepped portion may be equal to or higher than the height of each second stepped portion. The height of at least one of the first stepped portions may be higher than the height of each second stepped portion.
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