公开(公告)号：US20230221106A1

公开(公告)日：2023-07-13

申请号：US18121164

申请日：2023-03-14

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Tomofumi Suzuki ,  Kyosuke Kotani ,  Tatsuya Gugimoto ,  Yutaka Kuramoto ,  Katsumi Shibayama ,  Noburo Hosokawa

IPC: G01B9/02 ,  G01J3/45 ,  G01J3/02 ,  B81B3/00 ,  G02B27/14 ,  G02B26/08 ,  G02B7/182 ,  G01J3/10 ,  G01J3/14 ,  G01J3/453

CPC classification number: G01B9/02051 ,  G01J3/45 ,  G01J3/0202 ,  G01J3/021 ,  B81B3/00 ,  G02B27/144 ,  B81B3/0021 ,  B81B3/007 ,  G02B26/0816 ,  G02B7/182 ,  G01J3/108 ,  G01J3/0237 ,  G01B9/02049 ,  G02B26/0833 ,  G01J3/14 ,  G02B26/0841 ,  G01B2290/35 ,  G01J3/4532 ,  G01B2290/25 ,  B81B2203/0154 ,  G01J3/4535 ,  G01J2003/104 ,  B81B2201/042

Abstract: In an optical device, a base and a movable unit are constituted by a semiconductor substrate including a first semiconductor layer, an insulating layer, and a second semiconductor layer in this order from one side in a predetermined direction. The base is constituted by the first semiconductor layer, the insulating layer, and the second semiconductor layer. The movable unit includes an arrangement portion that is constituted by the second semiconductor layer. The optical function unit is disposed on a surface of the arrangement portion on the one side. The first semiconductor layer that constitutes the base is thicker than the second semiconductor layer that constitutes the base. A surface of the base on the one side is located more to the one side than the optical function unit.