公开(公告)号：US10804084B2

公开(公告)日：2020-10-13

申请号：US15760498

申请日：2015-09-16

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Souichi Katagiri ,  Keigo Kasuya

IPC: H01J41/16 ,  H01J41/20 ,  F04B37/02 ,  H01J37/073 ,  H01J37/28

Abstract: In a vacuum apparatus including an ultrahigh vacuum evacuation pump, the ultrahigh vacuum evacuation pump is provided with a rod-shaped cathode including a non-evaporable getter alloy, a cylindrical anode disposed so as to surround the cathode, and a coil or a ring-shaped permanent magnet disposed so as to sandwich upper and lower openings of the cylindrical anode and surround the rod-shaped cathode. As a result, it is possible to reduce the size and weight of the ultrahigh vacuum evacuation pump and to dispose the vacuum evacuation pump at a desired location in the vacuum apparatus.

公开(公告)号：US10586674B2

公开(公告)日：2020-03-10

申请号：US16081372

申请日：2016-11-24

Applicant: Hitachi High-Technologies Corporation

Inventor： Toshiaki Kusunoki ,  Tomihiro Hashizume ,  Keigo Kasuya ,  Takashi Ohshima ,  Yusuke Sakai ,  Yoichi Ose ,  Noriaki Arai

IPC: H01J37/073 ,  H01J1/22 ,  H01J1/304 ,  H01J9/02 ,  H01J37/28

Abstract: In order to provide a stable hexaboride single-crystal field emission electron source capable of heat-flashing, this field emission electron source is provided with a metal filament, a metal tube joined thereto, a hexaboride tip that emits electrons, and graphite sheets that are independent of the metal tube and the hexaboride tip. The hexaboride tip is arranged so as not to be in structural contact with the metal tube due to the graphite sheets. The hexaboride tip, the graphite sheets, and the metal tube are configured so as to be mechanically and electrically in contact with one another.

公开(公告)号：US10522319B2

公开(公告)日：2019-12-31

申请号：US16338006

申请日：2016-10-13

Applicant: Hitachi High-Technologies Corporation

Inventor： Keigo Kasuya ,  Noriaki Arai ,  Toshiaki Kusunoki ,  Takashi Ohshima ,  Tomihiro Hashizume ,  Yusuke Sakai

IPC: H01J37/073 ,  H01J9/02 ,  H01J37/28

Abstract: An electron beam apparatus which can stably achieve high spatial resolution also during low acceleration observation using CeB6 for the CFE electron source is provided. In an electron beam apparatus having a CFE electron source, the emitter of the electron beam of the CFE electron source is Ce hexaboride or a hexaboride of a lanthanoid metal heavier than Ce, the hexaboride emits the electron beam from the {310} plane, and the number of the atoms of the lanthanoid metal on the {310} plane is larger than the number of boron molecules comprising six boron atoms on the {310} plane.