公开(公告)号：US20190027351A1

公开(公告)日：2019-01-24

申请号：US16070790

申请日：2017-01-25

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Shin IMAMURA ,  Takashi OHSHIMA ,  Tomonobu TSUCHIYA ,  Hajime KAWANO ,  Makoto SUZUKI

IPC: H01J49/02 ,  H01J37/244 ,  G01T1/20

Abstract: The objective of the present invention is to provide a charged particle detector and a charged particle beam device with which it is possible to acquire a high luminous output while rapidly eliminating charged particles that are incident to a scintillator. In order to achieve said objective the present invention proposes: a charged particle detector provided with a light-emitting unit including a laminated structure obtained by laminating a GaInN-containing layer and a GaN layer, and provided with a conductive layer that is in contact with the GaInN-containing layer on the charged particle incidence surface side of the laminated structure; and a charged particle beam device.

公开(公告)号：US20190355549A1

公开(公告)日：2019-11-21

申请号：US16475726

申请日：2018-01-25

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Shin IMAMURA ,  Takashi OHSHIMA ,  Tomonobu TSUCHIYA ,  Hajime KAWANO ,  Shahedul HOQUE ,  Shunsuke MIZUTANI ,  Makoto SUZUKI

IPC: H01J37/244 ,  H01J49/02 ,  G01T1/20 ,  H01J37/28 ,  G01N23/2258

Abstract: The disclosure provides a charged particle detector including a scintillator that emits light with stable intensity and obtains high light emission intensity regardless of an energy of an incident electron. The disclosure provides the charged particle detector including: a first light-emitting part (21) in which a layer containing Ga1-x-yAlxInyN (where 0≤x

公开(公告)号：US20190316963A1

公开(公告)日：2019-10-17

申请号：US16472129

申请日：2017-10-24

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Takeshi ISHIDA ,  Isao YAMAZAKI ,  Sakuichiro ADACHI ,  Shin IMAMURA

IPC: G01J3/10 ,  G01J3/04 ,  G01J3/02 ,  G01N21/27 ,  G01N21/64

Abstract: An automatic analysis apparatus comprises: a light source generating light having a center wavelength equal to or shorter than 340 nm; a fluorescent substance excited by the light source light, and generates light together with transmitted light from the light source, having a wavelength of 340 nm to 800 nm; a condenser lens; at least one slit; a reaction cell holding a reaction solution where a specimen and reagent are mixed, and that the light source light and the light from the fluorescent substance enter; and a detector that detects light transmitted through the reaction cell. The light source, fluorescent substance, condenser lens, and slit are provided along a straight light corresponding to the optical axis. The width of the slit's opening is equal to or narrower than the width of a ray forming an image of the light source at the position of the slit.

公开(公告)号：US20190115186A1

公开(公告)日：2019-04-18

申请号：US16082745

申请日：2017-02-03

Applicant: Hitachi High-Technologies Corporation

Inventor： Yoshifumi SEKIGUCHI ,  Shin IMAMURA ,  Hajime KAWANO ,  Shahedul HOQUE

IPC: H01J37/244 ,  H01J37/28

CPC classification number: H01J37/244 ,  H01J37/28 ,  H01J2237/2443 ,  H01J2237/2445

Abstract: The present invention provides a light guide capable of guiding light generated by a scintillator at high efficiency to a photoreceiving element, a detector, and a charged particle beam device. For attaining the purpose, the present invention proposes a light guide that guides light generated by a scintillator to a photoreceiving element, provided with a scintillator containment portion formed of a first surface facing a surface opposite to a charged particle incident surface of the scintillator and a second surface facing a surface different from the surface opposite to the charged particle incident surface of the scintillator, and a tilted surface reflecting light incident from the second surface to the inside of the light guide.