公开(公告)号：US20150060694A1

公开(公告)日：2015-03-05

申请号：US14379694

申请日：2013-02-20

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Kazuhiro Gunji ,  Yasushi Ebizuka ,  Yuta Asaga

IPC: H01J37/18 ,  H01J37/28

CPC classification number: H01J37/18 ,  H01J37/185 ,  H01J37/28 ,  H01J2237/18 ,  H01J2237/204 ,  H01J2237/28 ,  H01J2237/2801

Abstract: A charged particle beam device that appropriately maintains a throughput of the device for each of specimens different in a gas emission volume from each other is provided. A scanning electron microscope includes an electron source, a specimen stage, a specimen chamber, and an exchange chamber, and further includes a vacuum gauge that measures an internal pressure of the exchange chamber, a time counting unit that counts time taken when a measurement result by the vacuum gauge has reached a predetermined degree of vacuum, and an integral control unit that performs comparative calculation and determination based on a measurement result by the time counting unit and integral control based on a process flow. And, the integral control unit controls changing of a content of a subsequent process based on a shift of the degree of vacuum of the exchange chamber (for example, based on vacuum exhaust time in the exchange chamber when the specimen is in the exchange chamber or a variation of the degree of vacuum of the exchange chamber for a predetermined time interval when the specimen is in the exchange chamber).

Abstract translation: 提供了一种带电粒子束装置，其适当地保持每个气体排放量彼此不同的样本的装置的生产量。 扫描电子显微镜包括电子源，试样台，试样室和交换室，还包括测量交换室的内部压力的真空计，计时单元，其计算测量结果所用的时间 通过真空计已经达到预定的真空度，以及积分控制单元，其基于通过时间计数单元的测量结果和基于处理流程的积分控制进行比较计算和确定。 并且，积分控制单元基于交换室的真空度的变化来控制随后的处理的内容的变化（例如，当检体在交换室中时，基于交换室中的真空排气时间，或者 当样本在交换室中时，预定时间间隔内的交换室的真空度的变化）。

公开(公告)号：US09245710B2

公开(公告)日：2016-01-26

申请号：US14379694

申请日：2013-02-20

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Kazuhiro Gunji ,  Yasushi Ebizuka ,  Yuta Asaga

IPC: H01J37/18 ,  H01J37/16 ,  H01J37/20 ,  H01J37/28

CPC classification number: H01J37/18 ,  H01J37/185 ,  H01J37/28 ,  H01J2237/18 ,  H01J2237/204 ,  H01J2237/28 ,  H01J2237/2801

Abstract: A charged particle beam device that appropriately maintains a throughput of the device for each of specimens different in a gas emission volume from each other is provided. A scanning electron microscope includes an electron source, a specimen stage, a specimen chamber, and an exchange chamber, and further includes a vacuum gauge that measures an internal pressure of the exchange chamber, a time counting unit that counts time taken when a measurement result by the vacuum gauge has reached a predetermined degree of vacuum, and an integral control unit that performs comparative calculation and determination based on a measurement result by the time counting unit and integral control based on a process flow. And, the integral control unit controls changing of a content of a subsequent process based on a shift of the degree of vacuum of the exchange chamber.

Abstract translation: 提供了一种带电粒子束装置，其适当地保持每个气体排放量彼此不同的样本的装置的生产量。 扫描电子显微镜包括电子源，试样台，试样室和交换室，还包括测量交换室的内部压力的真空计，计时单元，其计算测量结果所用的时间 通过真空计已经达到预定的真空度，以及积分控制单元，其基于通过时间计数单元的测量结果和基于处理流程的积分控制进行比较计算和确定。 并且，积分控制单元基于交换室的真空度的变化来控制后续处理的内容的变化。