公开(公告)号：US20160203941A1

公开(公告)日：2016-07-14

申请号：US14911681

申请日：2014-03-10

Applicant: HITACHI-TECHNOLOGIES CORPORATION

Inventor： Shinsuke KAWANISHI ,  Yusuke OMINAMI ,  Hiroyuki SUZUKI ,  Masahiko AJIMA

IPC: H01J37/20 ,  G01M3/02 ,  H01J37/26

CPC classification number: H01J37/20 ,  G01M3/02 ,  H01J37/16 ,  H01J37/18 ,  H01J37/26 ,  H01J37/28 ,  H01J2237/188 ,  H01J2237/2002 ,  H01J2237/2006 ,  H01J2237/2605 ,  H01J2237/2608 ,  H01J2237/2802

Abstract: Conventional devices have been difficult to use due to insufficient consideration being given to factors such as the cost necessary for diaphragm replacement and the convenience of the work. In the present invention, a diaphragm mounting member installed in a charged particle beam device for radiating a primary charged particle beam through a diaphragm separating a vacuum space and an atmospheric pressure space onto a sample placed in the atmospheric pressure space is provided with a diaphragm installation portion to which a TEM membrane is mounted and a casing fixing portion mounted on a casing of the charged particle beam device. The diaphragm installation portion has a positioning structure for positioning a platform on which the diaphragm is held.

Abstract translation: 由于对膜片更换所需的成本和工作的便利性等因素的考虑不足，常规装置难以使用。 在本发明中，安装在带电粒子束装置中的隔膜安装构件设置有隔膜装置，该带电粒子束装置通过将分离真空空间和大气压空间的隔膜分离到放置在大气压空间中的样品上的一次带电粒子束， 安装有TEM膜的部分和安装在带电粒子束装置的壳体上的壳体固定部。 隔膜安装部具有用于定位保持隔膜的平台的定位结构。