EQUIPMENT FOR REMOVING PROTECTIVE COATINGS FROM SUBSTRATES
    2.
    发明申请
    EQUIPMENT FOR REMOVING PROTECTIVE COATINGS FROM SUBSTRATES 审中-公开
    从基板上去除保护性涂层的设备

    公开(公告)号:US20160184964A1

    公开(公告)日:2016-06-30

    申请号:US14841596

    申请日:2015-08-31

    Applicant: HZO, Inc.

    CPC classification number: B24C1/003 B24C1/04 B24C1/086 H01L21/67069

    Abstract: Apparatuses and systems that enable selective removal of protective coatings from substrates are disclosed. Such a material removal system may use pressurized solid carbon dioxide (CO2) (i.e., dry ice) to remove a selected portion of a protective coating from a substrate. The material removal system may include one or more templates that provide selectivity in removing protective coatings from one or more substrates, fixtures for holding one or more substrates in place while material removal processes occur and apparatuses for positioning one or more substrates at desired locations in material removal systems.

    Abstract translation: 公开了能够从衬底中选择性地去除保护性涂层的装置和系统。 这种材料去除系统可以使用加压的固体二氧化碳(CO 2)(即干冰)从衬底去除保护涂层的选定部分。 材料去除系统可以包括一个或多个模板,其提供从一个或多个基板去除保护涂层的选择性,用于在发生材料去除过程时将一个或多个基板保持就位的固定装置,以及用于将一个或多个基板定位在材料的期望位置处的装置 清除系统。

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