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公开(公告)号：US10743421B2
公开(公告)日：2020-08-11
申请号：US15627274
申请日：2017-06-19
Applicant: HZO, Inc.
Abstract: A coating apparatus includes a first vaporizer configured to vaporize a first precursor material, a second vaporizer configured to vaporize a second precursor material in series with the first vaporizer, at least one pyrolysis chamber configured to further process vaporized precursor material from one of the first vaporizer or second vaporizer, and a deposition chamber configured to receive the processed precursor materials.
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公开(公告)号：US10719634B2
公开(公告)日：2020-07-21
申请号：US15147659
申请日：2016-05-05
Applicant: HzO, Inc.
Abstract: A method for optimizing a cracking efficiency with which a pyrolysis tube of a deposition apparatus cracks a precursor material into reactive species is disclosed, including measuring an input pressure at an entrance to the pyrolysis tube, outside of the pyrolysis tube; measuring an output pressure at an exit from the pyrolysis tube, outside of the pyrolysis tube; measuring a pyrolysis temperature within the pyrolysis tube; calculating a cracking efficiency based on the input pressure, the output pressure and the pyrolysis temperature; and determining an adjustment to be made to at least one of the input pressure, the output pressure and the pyrolysis temperature to increase the cracking efficiency.
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公开(公告)号：US10669627B2
公开(公告)日：2020-06-02
申请号：US15691593
申请日：2017-08-30
Applicant: HZO, Inc.
Inventor： Yang Yun , Max Sorenson , Chien-Lan Hsueh , Tining Su , Jim Dempster , Alex Anderson , Layton Baker
IPC: C23C16/455 , H01L21/67 , H01L21/677 , C23C16/44 , C23C16/00 , C23C16/52 , H01L21/02
Abstract: A modular multilayer deposition system includes a plurality of modular deposition chambers, including at least one parylene deposition chamber and at least one ALD deposition chamber. The parylene deposition chamber is connected in series with the ALD deposition chamber. Substrates are automatically moved from within the parylene deposition chamber to within the ALD deposition chamber or from within the ALD deposition chamber to the parylene deposition chamber.
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公开(公告)号：US10792700B2
公开(公告)日：2020-10-06
申请号：US14834325
申请日：2015-08-24
Applicant: HZO, Inc.
Inventor： Bronwyn Cox , Sean Owen Clancy , Yang Yun , Tining Su , Liulei Cao
IPC: B05D1/00 , C09D165/04 , C08K5/00 , B05D5/06 , B05D1/34
Abstract: Protective coatings with one or more additives dispersed therethrough are disclosed. A protective coating may comprise a poly(p-xylylene), or parylene. An additive may be configured to cause the protective coating to contrast (e.g., visibly, etc.) with features or components that are exposed beyond a periphery of the protective coating. Additives that provide other characteristics are also disclosed. In addition, methods for applying protective coatings according to this disclosure are disclosed, as are inspection methods.
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公开(公告)号：US09848495B2
公开(公告)日：2017-12-19
申请号：US14740211
申请日：2015-06-15
Applicant: HZO, Inc.
Inventor： Liulei Cao , Tining Su , Yang Yun
CPC classification number: H05K3/284 , H05K3/285 , H05K3/341 , H05K2201/0191 , H05K2201/10977 , H05K2203/0759 , Y02P70/613
Abstract: Protective coatings are disclosed that are configured to cover electronic components within an electronic device, while enabling electrical connections to be established with electrical contacts that are covered by the protective coatings. Such a protective coating may comprise a parylene, or a poly(p-xylylene), protective coating that has a thickness of at least 0.1 μm and at most about 2 μm. Electronic devices that include such a protective coating are also disclosed.
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Patent Agency Ranking
公开(公告)号：US20160052015A1
公开(公告)日：2016-02-25
申请号：US14834325
申请日：2015-08-24
Applicant: HZO, Inc.
Inventor： Bronwyn Cox , Sean Owen Clancy , Yang Yun , Tining Su , Liulei Cao
IPC: B05D1/00 , C09D7/12 , C09D147/00
CPC classification number: B05D1/60 , B05D1/34 , B05D5/06 , C08G2261/3424 , C08G2261/59 , C08G2261/592 , C08K5/0008 , C08K5/0041 , C08K5/005 , C09D165/04
Abstract: Protective coatings with one or more additives dispersed therethrough are disclosed. A protective coating may comprise a poly(p-xylylene), or parylene. An additive may be configured to cause the protective coating to contrast (e.g., visibly, etc.) with features or components that are exposed beyond a periphery of the protective coating. Additives that provide other characteristics are also disclosed. In addition, methods for applying protective coatings according to this disclosure are disclosed, as are inspection methods.
Abstract translation: 公开了一种或多种分散在其中的添加剂的保护涂层。 保护性涂层可以包含聚（对二甲苯）或聚对二甲苯。 添加剂可以被配置成使得保护涂层与暴露在保护涂层的周边之外的特征或组分形成对比（例如，明显地等）。 还提供了提供其他特征的添加剂。 此外，公开了根据本公开的施加保护性涂层的方法，以及检查方法。
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7.发明申请IMPERMEABLE PROTECTIVE COATINGS THROUGH WHICH ELECTRICAL CONNECTIONS MAY BE ESTABLISHED AND ELECTRONIC DEVICES INCLUDING THE IMPERMEABLE PROTECTIVE COATINGS 有权可以通过电气连接建立不可预见的保护涂层和包括不可预见的保护涂层的电子设备公开(公告)号：US20150366097A1
公开(公告)日：2015-12-17
申请号：US14740211
申请日：2015-06-15
Applicant: HZO, Inc.
Inventor： Liulei Cao , Tining Su , Yang Yun
CPC classification number: H05K3/284 , H05K3/285 , H05K3/341 , H05K2201/0191 , H05K2201/10977 , H05K2203/0759 , Y02P70/613
Abstract: Protective coatings are disclosed that are configured to cover electronic components within an electronic device, while enabling electrical connections to be established with electrical contacts that are covered by the protective coatings. Such a protective coating may comprise a parylene, or a poly(p-xylylene), protective coating that has a thickness of at least 0.1 μm and at most about 2 μm. Electronic devices that include such a protective coating are also disclosed.
Abstract translation: 公开了保护涂层，其被配置为覆盖电子设备内的电子部件，同时能够利用被保护涂层覆盖的电触点建立电连接。 这种保护性涂层可以包含具有至少0.1μm且至多约2μm的厚度的聚对二甲苯或聚（对二甲苯）保护涂层。 还公开了包括这种保护涂层的电子器件。
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8.发明申请PROTECTIVE COATINGS FOR ELECTRONIC DEVICES AND ATOMIC LAYER DEPOSITION PROCESSES FOR FORMING THE PROTECTIVE COATINGS 审中-公开用于形成防护涂层的电子器件和原子层沉积工艺的保护涂层公开(公告)号：US20150361551A1
公开(公告)日：2015-12-17
申请号：US14740193
申请日：2015-06-15
Applicant: HZO, Inc.
Inventor： Tining Su , Sean Owen Clancy , Chien-Lan Hsueh , Yang Yun , Liulei Cao
IPC: C23C16/455 , C23C16/50 , C23C16/48
CPC classification number: C23C16/45544 , C23C16/403 , C23C16/405 , C23C16/45536 , C23C16/482
Abstract: A protective coating for an electronic device, such as a coating that is substantially impermeable to moisture and oxygen, comprises an ultra-thin film comprising a plurality of sub-layers formed by atomic layer deposition (ALD) processes. Low temperature ALD processes may be used to form the sub-layers of the protective coating. The density of the protective film may be enhanced with energy, to which the protective coating or sub-layers thereof may be exposed during deposition or intermittently during the deposition process. ALD apparatuses that are equipped to perform the disclosed processes are also disclosed, as are electronic devices that include the disclosed protective coatings.
Abstract translation: 用于电子设备的保护涂层，例如基本上不透水分和氧气的涂层，包括包含通过原子层沉积（ALD）工艺形成的多个子层的超薄膜。 可以使用低温ALD工艺来形成保护涂层的子层。 保护膜的密度可以通过在沉积过程中或者间歇地沉积期间保护涂层或其子层可能暴露的能量来增强。 还公开了用于执行所公开的处理的ALD设备，以及包括所公开的保护涂层的电子设备。
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公开(公告)号：US11494526B2
公开(公告)日：2022-11-08
申请号：US16932395
申请日：2020-07-17
Applicant: HZO, Inc.
Abstract: A method for optimizing a cracking efficiency with which a pyrolysis tube of a deposition apparatus cracks a precursor material into reactive species is disclosed, including measuring an input pressure at an entrance to the pyrolysis tube, outside of the pyrolysis tube; measuring an output pressure at an exit from the pyrolysis tube, outside of the pyrolysis tube; measuring a pyrolysis temperature within the pyrolysis tube; calculating a cracking efficiency based on the input pressure, the output pressure and the pyrolysis temperature; and determining an adjustment to be made to at least one of the input pressure, the output pressure and the pyrolysis temperature to increase the cracking efficiency.
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公开(公告)号：US20210012038A1
公开(公告)日：2021-01-14
申请号：US16932395
申请日：2020-07-17
Applicant: HZO, Inc.
Abstract: A method for optimizing a cracking efficiency with which a pyrolysis tube of a deposition apparatus cracks a precursor material into reactive species is disclosed, including measuring an input pressure at an entrance to the pyrolysis tube, outside of the pyrolysis tube; measuring an output pressure at an exit from the pyrolysis tube, outside of the pyrolysis tube; measuring a pyrolysis temperature within the pyrolysis tube; calculating a cracking efficiency based on the input pressure, the output pressure and the pyrolysis temperature; and determining an adjustment to be made to at least one of the input pressure, the output pressure and the pyrolysis temperature to increase the cracking efficiency.
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