公开(公告)号：US20240370992A1

公开(公告)日：2024-11-07

申请号：US18685981

申请日：2021-08-27

Applicant: Hitachi High-Tech Corporation

Inventor： Azusa KONNO ,  Ichiro FUJIMURA

IPC: G06T7/00

Abstract: A technique capable of easily and efficiently implementing determination and detection of an abnormality by comparison of similar cell structures in an observation image is provided. A computer system analyzes an observation image of a sample by a charged particle beam apparatus. The computer system executes an extraction process (Step S3) of extracting one or more second cell regions similar to a reference image as a similar image from the observation image, the reference image being a first cell region designated by a user or automatically set, a determination process (Step S6) of comparing, based on a rule in which a relationship between a plurality of regions of interest (ROIs) included in the reference image is defined, the plurality of ROIs between the reference image and the extracted similar image to determine presence or absence of an abnormality, and an output process (Step S7) of outputting, to the user, a position of each cell region and the presence or absence of the abnormality as a determination result.

公开(公告)号：US20240393270A1

公开(公告)日：2024-11-28

申请号：US18695035

申请日：2021-09-30

Applicant: Hitachi High-Tech Corporation

Inventor： Azusa KONNO ,  Ichiro FUJIMURA ,  Toru AISO ,  Kazuhiro KOYAMA ,  Takashi SHIDARA

IPC: G01N23/2251 ,  G01B11/24

Abstract: A technology capable of acquiring depth information of a sample quickly and accurately is provided. A computer system in an analysis system acquires 3-dimensional coordinate information of a top surface shape of a sample having a stacking structure, the 3-dimensional coordinate information being measured by a top surface shape measurement apparatus (CSI), acquires 2-dimensional coordinate information based on a photographic image of the sample imaged by a charged particle beam apparatus (SEM), performs coordinate conversion for association between the 3-dimensional coordinate information of the CSI and the 2-dimensional coordinate information of the SEM and acquires association data which is a result, and acquires depth information on a coordinate system of the SEM based on the association data.

公开(公告)号：US20230377836A1

公开(公告)日：2023-11-23

申请号：US18027501

申请日：2020-09-28

Applicant: Hitachi High-Tech Corporation

Inventor： Azusa KONNO ,  Takashi SHIDARA ,  Ichiro FUJIMURA ,  Daiji KIRIHATA ,  Hiromi MISE

IPC: H01J37/22 ,  H01J37/244

CPC classification number: H01J37/222 ,  H01J37/244 ,  H01J2237/24578 ,  H01J2237/2448

Abstract: Depth information of a multilayer structure is acquired quickly and with high accuracy. An analysis system includes (a) acquiring a first captured image of a sample SAM viewed from a first direction by irradiating the sample SAM including a multilayer structure with an electron beam EB1 from the first direction, (b) acquiring a second captured image of the sample SAM viewed from a second direction by irradiating the sample SAM with the electron beam EB1 from the second direction, in which the second direction intersects the first direction, (c) acquiring depth information of the multilayer structure using information of the sample SAM including the first captured image, the second captured image, a number of layers of the multilayer structure, a thickness of one layer or a thickness of each layer of the multilayer structure, and a depth at which a first layer of the multilayer structure starts.