公开(公告)号：US20240055220A1

公开(公告)日：2024-02-15

申请号：US18267502

申请日：2020-12-23

Applicant: Hitachi High-Tech Corporation

Inventor： Yuka II

IPC: H01J37/20 ,  H01J37/304 ,  H01J37/28 ,  H01J37/305

CPC classification number: H01J37/20 ,  H01J37/3045 ,  H01J37/28 ,  H01J37/3056 ,  H01J2237/208 ,  H01J2237/31749

Abstract: A charged particle beam device includes a sample stage on which a sample is mounted and moved, a charged particle beam irradiation optical system irradiating with a charged particle beam, a sample piece movement unit holding and conveying a sample piece extracted from the sample, a holder fixing table holding a sample piece holder to which the sample piece is transferred, and a computer. When allowing the sample piece movement unit to approach the sample piece, the computer selects a matching region for performing image matching between a reference image obtained in advance by irradiating the sample with the charged particle beam and a comparison image obtained by irradiating the sample, which is an extraction target for the sample piece, with the charged particle beam.