公开(公告)号：US20150017328A1

公开(公告)日：2015-01-15

申请号：US14331319

申请日：2014-07-15

Applicant: IBIDEN CO., LTD.

Inventor： Takashi Nakane ,  Yoshihiro Nishio ,  Yoshiki Kawai ,  Teruyoshi Hisada ,  Koya Ozeki ,  Mitsutaka Naitoh ,  Yutaka Shichi

IPC: B05B15/08 ,  B05B1/14 ,  B05B7/08 ,  B05B13/06 ,  B05B15/12 ,  B05B1/02 ,  B05B13/02

CPC classification number: B05B13/069 ,  B05B1/02 ,  B05B1/14 ,  B05B13/0221 ,  B05B15/68 ,  B05B16/40 ,  B05B16/95

Abstract: A surface treatment apparatus includes a treatment vessel which contains a treatment solution, a transfer device which transfers a substrate through an interior portion of the treatment vessel in an in-plane direction of the substrate, and a jet device which is positioned in the interior portion of the treatment vessel and jets the treatment solution onto a surface of the substrate such that the surface of the substrate is treated with the treatment solution in the interior portion of the treatment vessel. The jet device has a nozzle hole which jets the treatment solution in a jet direction set parallel or diagonal with respect to the substrate surface.

Abstract translation: 表面处理装置包括含有处理溶液的处理容器，在基板的面内方向上通过处理容器的内部传送基板的转印装置，以及位于内部的喷射装置 并将处理溶液喷射到基板的表面上，使得基板的表面用处理容器内部的处理溶液处理。 喷射装置具有喷嘴孔，其以相对于基板表面平行或对角设置的喷射方向喷射处理溶液。