公开(公告)号：US20240425361A1

公开(公告)日：2024-12-26

申请号：US18672583

申请日：2024-05-23

Applicant: Infineon Technologies AG

Inventor： Björn Oliver Eversmann ,  Christian Bretthauer ,  Marco Haubold ,  Heinrich Guenther Heiss ,  Giuseppe Bernacchia ,  Andreas Wiesbauer ,  Dominik Mayrhofer

IPC: B81B7/00

Abstract: In accordance with an embodiment, A micro electro mechanical system (MEMS) device includes a cavity configured to contain a fluid; a pump configured to generate a pressure to the fluid in the cavity, wherein the pressure is configured to cause the fluid to be emitted from the cavity; a sensor configured to sense an electrical parameter based on an electrical impedance of the pump, and configured to provide a sensor signal based on the electrical parameter; and a controller configured to control an operation of the pump; wherein the controller is configured to process the sensor signal to adapt an operation of the MEMS device or for failure detection.

公开(公告)号：US20230412968A1

公开(公告)日：2023-12-21

申请号：US18334489

申请日：2023-06-14

Applicant: Infineon Technologies AG

Inventor： Christian Bretthauer ,  Marco Haubold ,  Bjoern Oliver Eversmann ,  Dominik Mayrhofer

IPC: H04R1/24 ,  H04R3/14 ,  H04R17/00 ,  H04R3/04 ,  H04R23/00 ,  H04R23/02 ,  H04R1/02 ,  H04R7/04

CPC classification number: H04R1/24 ,  H04R3/14 ,  H04R17/00 ,  H04R3/04 ,  H04R23/002 ,  H04R23/02 ,  H04R1/025 ,  H04R7/04 ,  H04R2201/003

Abstract: A MEMS package comprises a first speaker arrangement configured for emitting sound in a first audio frequency range and a second speaker arrangement configured for emitting sound in a different second audio frequency range.

公开(公告)号：US20230406694A1

公开(公告)日：2023-12-21

申请号：US18334468

申请日：2023-06-14

Applicant: Infineon Technologies AG

Inventor： Christian Bretthauer ,  Marco Haubold ,  Hans-Jörg Timme ,  Dominik Mayrhofer

IPC: B81B3/00 ,  H04R19/02

CPC classification number: B81B3/0021 ,  B81B3/007 ,  H04R19/02 ,  H04R2201/003 ,  B81B2203/06 ,  B81B2201/0257 ,  B81B2201/036 ,  B81B2203/0127

Abstract: A MEMS device includes a substrate having a cavity and a membrane structure mechanically connected to the substrate and configured for deflecting out-of-plane with regard to a substrate plane and with a frequency in an ultrasonic frequency range to cause a fluid motion of the fluid in the cavity. The MEMS device includes a valve structure sandwiching the cavity together with the membrane structure, wherein the valve structure includes a planar perforated structure and a shutter structure opposing the perforated structure and arranged movably in-plane and with a frequency in the ultrasonic frequency range and with regard to the substrate plane and between a first position and a second position. The shutter structure is arranged to provide a first fluidic resistance for the fluid in the first position and a second, higher fluidic resistance for the fluid in the second position.