公开(公告)号：US09658179B2

公开(公告)日：2017-05-23

申请号：US14749102

申请日：2015-06-24

Applicant: Infineon Technologies AG

Inventor： Vijaye Kumar Rajaraman ,  Yonsuang Arnanthigo ,  Alfons Dehe ,  Stefan Kolb

IPC: G01N27/22 ,  B81C1/00 ,  B81B3/00

CPC classification number: B81B7/02 ,  B81B3/0018 ,  B81B2201/0214 ,  B81B2201/0257 ,  B81B2201/0278 ,  B81C1/00166 ,  B81C1/00182 ,  B81C1/00206 ,  G01N27/223 ,  H04R19/005 ,  H04R19/04 ,  H04R31/003 ,  H04R2201/003

Abstract: According to an embodiment, a microelectromechanical systems (MEMS) transducer includes a substrate with a first cavity that passes through the substrate from a backside of the substrate. The MEMS transducer also includes a perforated first electrode plate overlying the first cavity on a topside of the substrate, a second electrode plate overlying the first cavity on the topside of the substrate and spaced apart from the perforated first electrode plate by a spacing region, and a gas sensitive material in the spacing region between the perforated first electrode plate and the second electrode plate. The gas sensitive material has an electrical property that is dependent on a concentration of a target gas.

公开(公告)号：US20160377569A1

公开(公告)日：2016-12-29

申请号：US14749102

申请日：2015-06-24

Applicant: Infineon Technologies AG

Inventor： Vijaye Kumar Rajaraman ,  Yonsuang Arnanthigo ,  Alfons Dehe ,  Stefan Kolb

IPC: G01N27/22 ,  B81C1/00 ,  B81B3/00

CPC classification number: B81B7/02 ,  B81B3/0018 ,  B81B2201/0214 ,  B81B2201/0257 ,  B81B2201/0278 ,  B81C1/00166 ,  B81C1/00182 ,  B81C1/00206 ,  G01N27/223 ,  H04R19/005 ,  H04R19/04 ,  H04R31/003 ,  H04R2201/003

Abstract: According to an embodiment, a microelectromechanical systems (MEMS) transducer includes a substrate with a first cavity that passes through the substrate from a backside of the substrate. The MEMS transducer also includes a perforated first electrode plate overlying the first cavity on a topside of the substrate, a second electrode plate overlying the first cavity on the topside of the substrate and spaced apart from the perforated first electrode plate by a spacing region, and a gas sensitive material in the spacing region between the perforated first electrode plate and the second electrode plate. The gas sensitive material has an electrical property that is dependent on a concentration of a target gas.

Abstract translation: 根据实施例，微机电系统（MEMS）换能器包括具有第一空腔的衬底，该衬底从衬底的背面穿过衬底。 所述MEMS换能器还包括覆盖所述基底顶面上的所述第一空腔的穿孔第一电极板，覆盖所述基底的顶侧上的所述第一空腔并且与穿孔的第一电极板间隔开间隔区域的第二电极板，以及 在穿孔的第一电极板和第二电极板之间的间隔区域中的气体敏感材料。 气体敏感材料具有取决于目标气体浓度的电性质。

公开(公告)号：US20170217765A1

公开(公告)日：2017-08-03

申请号：US15492193

申请日：2017-04-20

Applicant: Infineon Technologies AG

Inventor： Vijaye Kumar Rajaraman ,  Yonsuang Arnanthigo ,  Alfons Dehe ,  Stefan Kolb

IPC: B81B7/02 ,  H04R19/00 ,  H04R19/04 ,  H04R31/00 ,  G01N27/22 ,  B81C1/00

CPC classification number: B81B7/02 ,  B81B3/0018 ,  B81B2201/0214 ,  B81B2201/0257 ,  B81B2201/0278 ,  B81C1/00166 ,  B81C1/00182 ,  B81C1/00206 ,  G01N27/223 ,  H04R19/005 ,  H04R19/04 ,  H04R31/003 ,  H04R2201/003

Abstract: According to an embodiment, a microelectromechanical systems (MEMS) transducer includes a substrate with a first cavity that passes through the substrate from a backside of the substrate. The MEMS transducer also includes a perforated first electrode plate overlying the first cavity on a topside of the substrate, a second electrode plate overlying the first cavity on the topside of the substrate and spaced apart from the perforated first electrode plate by a spacing region, and a gas sensitive material in the spacing region between the perforated first electrode plate and the second electrode plate. The gas sensitive material has an electrical property that is dependent on a concentration of a target gas.

公开(公告)号：US20170030890A1

公开(公告)日：2017-02-02

申请号：US15221010

申请日：2016-07-27

Applicant: Infineon Technologies AG

Inventor： Gerald Holweg ,  Yonsuang Arnanthigo ,  Jan Berger ,  Guenter Denifl ,  Sylvicley Figueira Da Silva ,  Iris Moder ,  Thomas Ostermann ,  Alexander Oswatitsch ,  Vijaye Kumar Rajaraman ,  Gudrun Stranzl

IPC: G01N33/49 ,  B01D69/02 ,  B01D71/02 ,  B01D61/14

CPC classification number: G01N33/491 ,  B01D61/147 ,  B01D61/18 ,  B01D63/087 ,  B01D69/02 ,  B01D71/02 ,  B01D71/022 ,  B01D71/027 ,  B01D2313/345 ,  B01D2325/02 ,  B01D2325/26

Abstract: A microfiltration device comprises a substrate having a first surface and a second surface opposite to the first surface. The substrate includes a cavity between the first surface and the second surface. The substrate further includes a microfilter including a frame part in contact with the substrate and a filter part abutting the cavity. The microfilter comprises in both the frame part and the filter part a semiconducting or conducting material.

Abstract translation: 微滤装置包括具有第一表面和与第一表面相对的第二表面的基底。 衬底包括在第一表面和第二表面之间的空腔。 该基板还包括一个微型过滤器，它包括一个与该基板接触的框架部分和一个邻接腔体的过滤器部件。 微型过滤器在框架部分和过滤器部分中均包括半导体或导电材料。

公开(公告)号：US10017379B2

公开(公告)日：2018-07-10

申请号：US15492193

申请日：2017-04-20

Applicant: Infineon Technologies AG

Inventor： Vijaye Kumar Rajaraman ,  Yonsuang Arnanthigo ,  Alfons Dehe ,  Stefan Kolb

IPC: H01L21/02 ,  B81B7/02 ,  G01N27/22 ,  B81B3/00 ,  B81C1/00 ,  H04R19/00 ,  H04R19/04 ,  H04R31/00

CPC classification number: B81B7/02 ,  B81B3/0018 ,  B81B2201/0214 ,  B81B2201/0257 ,  B81B2201/0278 ,  B81C1/00166 ,  B81C1/00182 ,  B81C1/00206 ,  G01N27/223 ,  H04R19/005 ,  H04R19/04 ,  H04R31/003 ,  H04R2201/003

Abstract: According to an embodiment, a microelectromechanical systems (MEMS) transducer includes a substrate with a first cavity that passes through the substrate from a backside of the substrate. The MEMS transducer also includes a perforated first electrode plate overlying the first cavity on a topside of the substrate, a second electrode plate overlying the first cavity on the topside of the substrate and spaced apart from the perforated first electrode plate by a spacing region, and a gas sensitive material in the spacing region between the perforated first electrode plate and the second electrode plate. The gas sensitive material has an electrical property that is dependent on a concentration of a target gas.

公开(公告)号：US20170020424A1

公开(公告)日：2017-01-26

申请号：US15213853

申请日：2016-07-19

Applicant: Infineon Technologies AG

Inventor： Gerald Holweg ,  Yonsuang Arnanthigo ,  Vijaye Kumar Rajaraman

IPC: A61B5/157 ,  G01N33/49 ,  G01N21/77 ,  A61B90/98 ,  A61B5/151 ,  A61B5/145 ,  A61B5/00 ,  G01N33/487 ,  G01N27/07

CPC classification number: A61B5/157 ,  A61B5/002 ,  A61B5/14532 ,  A61B5/14539 ,  A61B5/14546 ,  A61B5/150022 ,  A61B5/150305 ,  A61B5/150358 ,  A61B5/150412 ,  A61B5/150847 ,  A61B5/150969 ,  A61B5/15105 ,  A61B5/15142 ,  A61B10/007 ,  A61B90/98 ,  A61B2562/0295 ,  G01N27/3272 ,  G01N33/48792 ,  G01N33/492

Abstract: A test strip comprises a test strip body comprising a fluid reservoir. The test strip further comprises a sensor unit configured to determine measurement data of a probe fluid in the fluid reservoir, and a communication unit electrically connected to the sensor unit, the communication unit including an antenna unit configured to transmit the measurement data. A system for determining measurement data of a probe fluid comprises the test strip and an external reader.

Abstract translation: 测试条包括包括流体储存器的测试条体。 测试条还包括被配置为确定流体存储器中的探针流体的测量数据的传感器单元和电连接到传感器单元的通信单元，所述通信单元包括被配置为传送测量数据的天线单元。 用于确定探针流体的测量数据的系统包括测试条和外部读取器。