公开(公告)号：US11099036B2

公开(公告)日：2021-08-24

申请号：US16508207

申请日：2019-07-10

Applicant: Integrated Device Technology, Inc.

Inventor： Gentjan Qama ,  Marco Nicolò ,  L'ubomir Fenic

IPC: G01D5/20 ,  G01R1/00 ,  H01L21/00

Abstract: An accurate position sensor is presented. The sensor operates over 360-degree motion angular motion and includes a coil structure formed on a substrate and a target mounted to be angularly moved over the coil structure, the target being formed of a conducting material in a shape of a spiral of Archimedes. The coil structure includes coils with an arc sufficient to operate over a 360 degree motion of the target, for example between 120 degrees and 360 degrees. Some embodiments include coils with a 180 degree arc. A method of operating the position sensor includes rotating a target formed of a conducting material in a shape of a spiral of Archimedes over a coil structure and providing a linearized and calibrated response indicating the angular position of the target relative to the coil structure.