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公开(公告)号：US20190025573A1
公开(公告)日：2019-01-24
申请号：US16072164
申请日：2016-04-01
Applicant: Intel Corporation
Inventor： Aleksandar ALEKSOV , Feras EID , Sasha N. OSTER , Shawna M. LIFF , Johanna M. SWAN , Thomas L. SOUNART , Baris BICEN , Valluri R. RAO
Abstract: Embodiments of the invention include maskless imaging tools and display systems that include piezoelectrically actuated mirrors and methods of forming such devices. According to an embodiment, the maskless imaging tool may include a light source. Additionally, the tool may include one or more piezoelectrically actuated mirrors for receiving light from the light source. In an embodiment, the piezoelectrically actuated mirrors are actuatable about one or more axes to reflect the light from the light source to a workpiece positioned to receive light from the piezoelectrically actuated mirror. Additional embodiments of the invention may include a maskless imaging tool that is a laser direct imaging lithography (LDIL) tool. Other embodiments may include a maskless imaging tool that is a via-drill tool. Embodiments of the invention may also include a piezoelectrically actuated mirror used in a projection system. For example, the projection system may be integrated into a pair of glasses.
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公开(公告)号：US20190297975A1
公开(公告)日：2019-10-03
申请号：US16303386
申请日：2016-07-02
Applicant: Intel Corporation
Inventor： Aleksandar ALEKSOV , Sasha N. OSTER , Feras EID , Shawna M. LIFF , Thomas L. SOUNART , Johanna M. SWAN , Baris BICEN , Valluri R. RAO
Abstract: Embodiments of the invention include an active venting system. According to an embodiment of the invention, the active venting system may include a substrate having one or more seams formed through the substrate. In order to open the vents defined by the seams through the substrate, a piezoelectric layer may be formed proximate to one or more of the seams. Additional embodiments may include a first electrode and a second electrode that contact the piezoelectric layer in order to provide a voltage differential across the piezoelectric layer. In an embodiment the active venting system may be integrated into a garment. In such an embodiment, the garment may also include an electronics module for controlling the actuators. Additionally, conductive traces may be printed on the garment or sewn into the garment to provide electrical connections from the electronics module to each of the piezoelectric actuators.
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公开(公告)号：US20170288639A1
公开(公告)日：2017-10-05
申请号：US15088830
申请日：2016-04-01
Applicant: Intel Corporation
Inventor： Adel A. ELSHERBINI , Feras EID , Baris BICEN , Telesphor KAMGAING , Vijay K. NAIR , Georgios C. DOGIAMIS , Johanna M. SWAN , Valluri R. RAO
Abstract: Embodiments of the invention include a waveguide structure that includes a first piezoelectric transducer that is positioned in proximity to a first end of a cavity of an organic substrate. The first piezoelectric transducer receives an input electrical signal and generates an acoustic wave to be transmitted with a transmission medium. A second piezoelectric transducer is positioned in proximity to a second end of the cavity. The second piezoelectric transducer receives the acoustic wave from the transmission medium and generates an output electrical signal.
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公开(公告)号：US20190036002A1
公开(公告)日：2019-01-31
申请号：US16072166
申请日：2016-04-01
Applicant: Intel Corporation
Inventor： Shawna M. LIFF , Feras EID , Aleksandar ALEKSOV , Sasha N. OSTER , Baris BICEN , Thomas L. SOUNART , Johanna M. SWAN , Adel A. ELSHERBINI , Valluri R. RAO
Abstract: Embodiments of the invention include piezoelectrically driven switches that are used for modifying a background color or light source color in display systems, and methods of forming such devices. In an embodiment, a piezoelectrically actuated switch for modulating a background color in a display may include a photonic crystal that has a plurality of blinds oriented substantially perpendicular to a surface of the display. In an embodiment, the blinds include a black surface and a white surface. The switch may also include an anchor spaced away from an edge of the photonic crystal and a piezoelectric actuator formed on the surface of the anchor and a surface of the photonic crystal. Some embodiments may include a photonic crystal that is a multi-layer polymeric structure or a polymer chain with a plurality of nanoparticles spaced at regular intervals on the polymer chain.
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公开(公告)号：US20190033500A1
公开(公告)日：2019-01-31
申请号：US16072173
申请日：2016-04-01
Applicant: Intel Corporation
Inventor： Thomas L. SOUNART , Baris BICEN , Feras EID , Sasha N. OSTER , Aleksandar ALEKSOV , Shawna M. LIFF , Valluri R. RAO , Johanna M. SWAN
Abstract: Embodiments of the invention include an optical grating switch integrated into an organic substrate and methods of forming such devices. According to an embodiment, the optical grating switch may include a cavity formed into an organic substrate. Additionally, the optical grating switch may include an array of moveable beams anchored to the organic substrate and suspended over the cavity. In an embodiment of the invention, each of the moveable beams in the optical grating switch may include a piezoelectric region formed over end portions of the moveable beam and a top electrode formed over a top surface of each of the piezoelectric regions. In order to reflect or diffract light, embodiments of the invention may include moveable beams that include a reflective surface formed over a central portion of the moveable beam.
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Patent Agency Ranking
公开(公告)号：US20200064555A1
公开(公告)日：2020-02-27
申请号：US16072240
申请日：2016-04-01
Applicant: Intel Corporation
Inventor： Sasha N. OSTER , Johanna M. SWAN , Feras EID , Thomas L. SOUNART , Aleksandar ALEKSOV , Shawna M. LIFF , Baris BICEN , Valluri R. RAO
Abstract: Embodiments of the invention include an optical routing device that includes an organic substrate. According to an embodiment, an array of cavities are formed into the organic substrate and an array of piezoelectrically actuated mirrors may be anchored to the organic substrate with each piezoelectrically actuated mirror extending over a cavity. In order to properly rout incoming optical signals, the optical routing device may also include a routing die mounted on the organic substrate. The routing die may be electrically coupled to each of the piezoelectrically actuated mirrors and is able to generated a voltage across the first and second electrodes of each piezoelectrically actuated mirror. Additionally, a photodetector may be electrically coupled to the routing die. According to an embodiment, an array of fiber optic cables may be optically coupled with one of the piezoelectrically actuated mirrors and optically coupled with the photodetector.
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公开(公告)号：US20190036004A1
公开(公告)日：2019-01-31
申请号：US16071992
申请日：2016-04-01
Applicant: Intel Corporation
Inventor： Feras EID , Sasha N. OSTER , Shawna M. LIFF , Johanna M. SWAN , Thomas L. SOUNART , Aleksandar ALEKSOV , Valluri R. RAO , Baris BICEN
IPC: H01L41/113 , H01L41/047 , H01L41/253 , H01L41/29 , H01L41/316 , H01L41/332 , H01L41/317 , H01L27/20 , G01L1/16
Abstract: Embodiments of the invention include a piezoelectric sensor system. According to an embodiment of the invention, the piezoelectric sensor system may include a piezoelectric sensor, a signal conditioning circuit, and a light source each formed on an organic or flexible substrate. In embodiments of the invention, the piezoelectric sensor may be a discrete component or the piezo electric sensor may be integrated into the substrate. According to an embodiment, a piezoelectric sensor that is integrated into the substrate may comprise, a cavity formed into the organic substrate and a moveable beam formed over the cavity and anchored to the organic substrate. Additionally, the piezoelectric sensor may include a piezoelectric region formed over an end portion of the moveable beam and extending at least partially over the cavity. The piezoelectric sensor may also include a top electrode formed over a top surface of the piezoelectric region.
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公开(公告)号：US20170288635A1
公开(公告)日：2017-10-05
申请号：US15088814
申请日：2016-04-01
Applicant: Intel Corporation
Inventor： Adel A. ELSHERBINI , Feras EID , Baris BICEN , Telesphor KAMGAING , Vijay K. NAIR , Johanna M. SWAN , Georgios C. DOGIAMIS , Valluri R. RAO
CPC classification number: H03H9/02259 , H03H9/17 , H03H9/2463 , H03H2009/02291 , H03H2009/155
Abstract: Embodiments of the invention include a piezoelectric resonator which includes an input transducer having a first piezoelectric material, a vibrating structure coupled to the input transducer, and an output transducer coupled to the vibrating structure. In one example, the vibrating structure is positioned above a cavity of an organic substrate. The output transducer includes a second piezoelectric material. In operation the input transducer causes an input electrical signal to be converted into mechanical vibrations which propagate across the vibrating structure to the output transducer.
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公开(公告)号：US20210210478A1
公开(公告)日：2021-07-08
申请号：US17191615
申请日：2021-03-03
Applicant: Intel Corporation
Inventor： Susheel JADHAV , Juan DOMINGUEZ , Ankur AGRAWAL , Kenneth BROWN , Yi LI , Jing CHEN , Aditi MALLIK , Xiaoyu HONG , Thomas LILJEBERG , Andrew C. ALDUINO , Ling LIAO , David HUI , Ren-Kang CHIOU , Harinadh POTLURI , Hari MAHALINGAM , Lobna KAMYAB , Sasanka KANUPARTHI , Sushrutha Reddy GUJJULA , Saeed FATHOLOLOUMI , Priyanka DOBRIYAL , Boping XIE , Abiola AWUJOOLA , Vladimir TAMARKIN , Keith MEASE , Stephen KEELE , David SCHWEITZER , Brent ROTHERMEL , Ning TANG , Suresh POTHUKUCHI , Srikant NEKKANTY , Zhichao ZHANG , Kaiyuan ZENG , Baikuan WANG , Donald TRAN , Ravindranath MAHAJAN , Baris BICEN , Grant SMITH
IPC: H01L25/18 , H01L23/473 , H01R12/71
Abstract: Embodiments disclosed herein include electronic packages for optical to electrical switching. In an embodiment, an electronic package comprises a first package substrate and a second package substrate attached to the first package substrate. In an embodiment, a die is attached to the second package substrate. In an embodiment, a plurality of photonic engines are attached to a first surface and a second surface of the first package substrate. In an embodiment, the plurality of photonic engines are communicatively coupled to the die through the first package substrate and the second package substrate.
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公开(公告)号：US20190121038A1
公开(公告)日：2019-04-25
申请号：US16098406
申请日：2016-07-01
Applicant: Intel Corporation
Inventor： Johanna M. SWAN , Aleksandar ALEKSOV , Sasha N. OSTER , Feras EID , Baris BICEN , Thomas L. SOUNART , Shawna M. LIFF , Valluri R. RAO
IPC: G02B6/42
Abstract: Embodiments of the invention include an optoelectronic package that allows for in situ alignment of optical fibers. In an embodiment, the optoelectronic package may include an organic substrate. Embodiments include a cavity formed into the organic substrate. Additionally, the optoelectronic package may include an actuator formed on the organic substrate that extends over the cavity. In one embodiment, the actuator may include a first electrode, a piezoelectric layer formed on the first electrode, and a second electrode formed on the piezoelectric layer. According to an additional embodiment of the invention, the actuator may include a first portion and a second portion. In order to allow for resistive heating and actuation driven by thermal expansion, a cross-sectional area of the first portion of the beam may be greater than a cross-sectional area of the second portion of the beam.
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