公开(公告)号：US12062631B2

公开(公告)日：2024-08-13

申请号：US17025181

申请日：2020-09-18

Applicant: Intel Corporation

Inventor： Adel A Elsherbini ,  Krishna Bharath ,  Kevin P. O'Brien ,  Kimin Jun ,  Han Wui Then ,  Mohammad Enamul Kabir ,  Gerald S. Pasdast ,  Feras Eid ,  Aleksandar Aleksov ,  Johanna M. Swan ,  Shawna M. Liff

IPC: H01L23/00 ,  H01L25/065 ,  H01L49/02

CPC classification number: H01L24/08 ,  H01L24/05 ,  H01L24/29 ,  H01L24/32 ,  H01L25/0657 ,  H01L28/10 ,  H01L2224/05147 ,  H01L2224/05639 ,  H01L2224/05644 ,  H01L2224/05647 ,  H01L2224/0801 ,  H01L2224/08145 ,  H01L2224/0903 ,  H01L2224/09055 ,  H01L2224/09505 ,  H01L2224/29186 ,  H01L2224/32145

Abstract: Disclosed herein are microelectronic assemblies including microelectronic components that are coupled together by direct bonding, as well as related structures and techniques. For example, in some embodiments, a microelectronic assembly may include a first microelectronic component and a second microelectronic component coupled to the first microelectronic component by a direct bonding region, wherein the direct bonding region includes at least part of an inductor.

公开(公告)号：US12107060B2

公开(公告)日：2024-10-01

申请号：US17025843

申请日：2020-09-18

Applicant: Intel Corporation

Inventor： Adel A. Elsherbini ,  Zhiguo Qian ,  Gerald S. Pasdast ,  Mohammad Enamul Kabir ,  Han Wui Then ,  Kimin Jun ,  Kevin P. O'Brien ,  Johanna M. Swan ,  Shawna M. Liff ,  Aleksandar Aleksov ,  Feras Eid

IPC: H01L23/00 ,  H01L25/065 ,  H01L49/02

CPC classification number: H01L24/08 ,  H01L24/05 ,  H01L24/29 ,  H01L24/32 ,  H01L25/0657 ,  H01L28/10 ,  H01L2224/05147 ,  H01L2224/05639 ,  H01L2224/05644 ,  H01L2224/05647 ,  H01L2224/0801 ,  H01L2224/08145 ,  H01L2224/0903 ,  H01L2224/09055 ,  H01L2224/29186 ,  H01L2224/32145

Abstract: Disclosed herein are microelectronic assemblies including microelectronic components that are coupled together by direct bonding, as well as related structures and techniques. For example, in some embodiments, a microelectronic assembly may include a first microelectronic component and a second microelectronic component coupled to the first microelectronic component by a direct bonding region, wherein the direct bonding region includes at least part of an inductor.

公开(公告)号：US20240145383A1

公开(公告)日：2024-05-02

申请号：US17974945

申请日：2022-10-27

Applicant: Intel Corporation

Inventor： June Choi ,  Keith E. Zawadzki ,  Kimberly L. Pierce ,  Mohammad Enamul Kabir

IPC: H01L23/528 ,  H01L23/522 ,  H01L23/532

CPC classification number: H01L23/528 ,  H01L23/5226 ,  H01L23/53209

Abstract: An integrated circuit structure includes a device layer including a first set of devices and a second set of devices. An interconnect layer is above the device layer, where the interconnect layer includes one or more conductive interconnect features within dielectric material. In an example, a first ring structure including conductive material extends within the interconnect layer, and a second ring structure including conductive material extends within the interconnect layer. In an example, the second ring structure is non-overlapping with the first ring structure. In an example, the first ring structure is above the first set of devices of the device layer, and the second ring structure is above the second set of devices of the device layer.

公开(公告)号：US20240063202A1

公开(公告)日：2024-02-22

申请号：US17820968

申请日：2022-08-19

Applicant: Intel Corporation

Inventor： Adel A. Elsherbini ,  Thomas Sounart ,  Henning Braunisch ,  William J. Lambert ,  Kaladhar Radhakrishnan ,  Shawna M. Liff ,  Mohammad Enamul Kabir ,  Omkar G. Karhade ,  Kimin Jun ,  Johanna M. Swan

IPC: H01L25/18 ,  H01L23/522 ,  H01L49/02 ,  H01L23/00 ,  H01L23/498 ,  H01L23/48 ,  H01L25/00

CPC classification number: H01L25/18 ,  H01L23/5223 ,  H01L28/90 ,  H01L24/08 ,  H01L23/49811 ,  H01L23/481 ,  H01L25/50 ,  H01L24/80 ,  H01L2224/08145 ,  H01L2224/80895 ,  H01L2224/80896

Abstract: Embodiments of a microelectronic assembly comprise: a plurality of layers of IC dies in a dielectric material, adjacent layers in the plurality of layers being coupled together by first interconnects having a pitch of less than 10 micrometers between adjacent first interconnects; a package substrate coupled to a first side of the plurality of layers by second interconnects; a support structure coupled to a second side of the plurality of layers by third interconnects, the second side being opposite to the first side; and capacitors in at least the plurality of layers or the support structure. The capacitors are selected from at least planar capacitors, deep trench capacitors and via capacitors.

公开(公告)号：US20240063180A1

公开(公告)日：2024-02-22

申请号：US17891654

申请日：2022-08-19

Applicant: Intel Corporation

Inventor： Kimin Jun ,  Adel Elsherbini ,  Omkar Karhade ,  Bhaskar Jyoti Krishnatreya ,  Mohammad Enamul Kabir ,  Jiraporn Seangatith ,  Tushar Talukdar ,  Shawna Liff ,  Johanna Swan ,  Feras Eid

IPC: H01L25/065 ,  H01L25/00 ,  H01L21/48 ,  H01L23/13 ,  H01L23/31

CPC classification number: H01L25/0652 ,  H01L25/50 ,  H01L21/4857 ,  H01L23/13 ,  H01L23/3185 ,  H01L24/05

Abstract: Quasi-monolithic multi-die composites including a primary fill structure within a space between adjacent IC dies. A fill material layer, which may have inorganic composition, may be bonded to a host substrate and patterned to form a primary fill structure that occupies a first portion of the host substrate. IC dies may be bonded to regions of the host substrate within openings where the primary fill structure is absent to have a spatial arrangement complementary to the primary fill structure. The primary fill structure may have a thickness substantially matching that of IC dies and/or be co-planar with a surface of one or more of the IC dies. A gap fill material may then be deposited within remnants of the openings to form a secondary fill structure that occupies space between the IC dies and the primary fill structure.

公开(公告)号：US20240063071A1

公开(公告)日：2024-02-22

申请号：US17891880

申请日：2022-08-19

Applicant: Intel Corporation

Inventor： Jeffery Bielefeld ,  Adel Elsherbini ,  Bhaskar Jyoti Krishnatreya ,  Feras Eid ,  Gauri Auluck ,  Kimin Jun ,  Mohammad Enamul Kabir ,  Nagatoshi Tsunoda ,  Renata Camillo-Castillo ,  Tristan A. Tronic ,  Xavier Brun

IPC: H01L23/31 ,  H01L25/065 ,  H01L23/00 ,  H01L23/367 ,  H01L23/498 ,  H01L21/48 ,  H01L21/56 ,  H01L25/00

CPC classification number: H01L23/3128 ,  H01L25/0655 ,  H01L24/08 ,  H01L23/367 ,  H01L23/49827 ,  H01L23/49838 ,  H01L21/4853 ,  H01L21/486 ,  H01L21/56 ,  H01L24/80 ,  H01L25/50 ,  H01L2224/08225 ,  H01L2224/80895 ,  H01L2224/80896

Abstract: Multi-die composite structures including a multi-layered inorganic dielectric gap fill material within a space between adjacent IC dies. A first layer of fill material with an inorganic composition may be deposited over IC dies with a high-rate deposition process, for example to at least partially fill a space between the IC dies. The first layer of fill material may then be partially removed to modify a sidewall slope of the first layer or otherwise reduce an aspect ratio of the space between the IC dies. Another layer of fill material may be deposited over the lower layer of fill material, for example with the same high-rate deposition process. This dep-etch-dep cycle may be repeated any number of times to backfill spaces between IC dies. The multi-layer fill material may then be globally planarized and the IC die package completed and/or assembled into a next-level of integration.

公开(公告)号：US20230197678A1

公开(公告)日：2023-06-22

申请号：US17558265

申请日：2021-12-21

Applicant: Intel Corporation

Inventor： Mohammad Enamul Kabir ,  Debendra Mallik

IPC: H01L25/065 ,  H01L23/31 ,  H01L23/498 ,  H01L23/00

CPC classification number: H01L25/0652 ,  H01L23/3128 ,  H01L23/49816 ,  H01L24/16 ,  H01L25/0657 ,  H01L2924/15311

Abstract: A microelectronic package structure with inorganic fill material having a first die with a second and an adjacent third die on the first die. Each of the second and third die comprise hybrid bonding interfaces with the first die. A first layer is on a region of the first die between the second and third dies. A second layer is over the first layer, the second layer comprising an inorganic dielectric material, wherein a top surface of the second layer is substantially coplanar with top surfaces of the second and third dies.

公开(公告)号：US20240347590A1

公开(公告)日：2024-10-17

申请号：US18755306

申请日：2024-06-26

Applicant: Intel Corporation

Inventor： Bhaskar Jyoti Krishnatreya ,  Guruprasad Arakere ,  Nitin Ashok Deshpande ,  Mohammad Enamul Kabir ,  Omkar Gopalkrishna Karhade ,  Keith Edward Zawadzki ,  Trianggono S. Widodo

IPC: H01L29/06 ,  H01L21/306 ,  H01L21/3065 ,  H01L21/78 ,  H01L23/00 ,  H01L25/065

CPC classification number: H01L29/0657 ,  H01L21/78 ,  H01L23/562 ,  H01L25/0655 ,  H01L21/30625 ,  H01L21/3065 ,  H01L24/08 ,  H01L2224/08221

Abstract: Systems, apparatus, articles of manufacture, and methods to reduce stress in integrated circuit packages are disclosed. An example semiconductor chip includes: a front surface; a back surface opposite the front surface; a first lateral surface extending between the front surface and the back surface; a second lateral surface extending between the front surface and the back surface; and a curved fillet at an intersection between the first lateral surface and the second lateral surface.

公开(公告)号：US20240063178A1

公开(公告)日：2024-02-22

申请号：US17821001

申请日：2022-08-19

Applicant: Intel Corporation

Inventor： Jimin Yao ,  Adel A. Elsherbini ,  Xavier Francois Brun ,  Kimin Jun ,  Shawna M. Liff ,  Johanna M. Swan ,  Yi Shi ,  Tushar Talukdar ,  Feras Eid ,  Mohammad Enamul Kabir ,  Omkar G. Karhade ,  Bhaskar Jyoti Krishnatreya

IPC: H01L25/065 ,  H01L23/31 ,  H01L23/00

CPC classification number: H01L25/0652 ,  H01L23/3107 ,  H01L24/16 ,  H01L24/08 ,  H01L2225/06548 ,  H01L2224/16227 ,  H01L2224/08145 ,  H01L2224/13116 ,  H01L2224/13111 ,  H01L2224/13113 ,  H01L2224/13139 ,  H01L2224/13147 ,  H01L2224/13155 ,  H01L2224/13109 ,  H01L2224/13118 ,  H01L24/13 ,  H01L2224/05611 ,  H01L2224/05644 ,  H01L2224/05639 ,  H01L2224/05647 ,  H01L2224/05613 ,  H01L2224/05609 ,  H01L2224/05605 ,  H01L24/05

Abstract: Microelectronic assemblies, related devices and methods, are disclosed herein. In some embodiments, a microelectronic assembly may include a first die and a through-dielectric via (TDV) surrounded by a dielectric material in a first layer, where the TDV has a greater width at a first surface and a smaller width at an opposing second surface of the first layer; a second die, surrounded by the dielectric material, in a second layer on the first layer, where the first die is coupled to the second die by interconnects having a pitch of less than 10 microns, and the dielectric material around the second die has an interface seam extending from a second surface of the second layer towards an opposing first surface of the second layer with an angle of less than 90 degrees relative to the second surface; and a substrate on and coupled to the second layer.

公开(公告)号：US20240063143A1

公开(公告)日：2024-02-22

申请号：US17891690

申请日：2022-08-19

Applicant: Intel Corporation

Inventor： Adel Elsherbini ,  Lance C. Hibbeler ,  Omkar Karhade ,  Chytra Pawashe ,  Kimin Jun ,  Feras Eid ,  Shawna Liff ,  Mohammad Enamul Kabir ,  Bhaskar Jyoti Krishnatreya ,  Tushar Talukdar ,  Wenhao Li

IPC: H01L23/00 ,  H01L25/065 ,  H01L25/00

CPC classification number: H01L23/562 ,  H01L25/0657 ,  H01L24/08 ,  H01L24/80 ,  H01L25/50 ,  H01L2224/08145 ,  H01L2224/80895 ,  H01L2224/80896 ,  H01L2225/06548 ,  H01L2225/06582 ,  H01L2924/3511

Abstract: Techniques and mechanisms to mitigate warping of a composite chiplet. In an embodiment, multiple via structures each extend through an insulator material in one of multiple levels of a composite chiplet. The insulator material extends around an integrated circuit (IC) component in the level. For a given one of the multiple via structures, a respective annular structure extends around the via structure to mitigate a compressive (or tensile) stress due to expansion (or contraction) of the via structure. In another embodiment, the composite chiplet additionally or alternatively comprises a structural support layer on the multiple levels, wherein the structural support layer has formed therein or thereon dummy via structures or a warpage compensation film.