公开(公告)号：US11664187B2

公开(公告)日：2023-05-30

申请号：US17344134

申请日：2021-06-10

Applicant: Intel Corporation

Inventor： Amir Raveh ,  Gideon Reisfeld ,  Patrick Pardy

IPC: H01J37/304 ,  H01J37/153 ,  H01J37/12 ,  H01J37/14 ,  G02B26/08 ,  H01J37/244 ,  H01J37/28 ,  H01J37/305 ,  H01J37/317

CPC classification number: H01J37/153 ,  G02B26/0816 ,  H01J37/12 ,  H01J37/14 ,  H01J37/244 ,  H01J37/304 ,  H01J37/28 ,  H01J37/3053 ,  H01J37/3174 ,  H01J2237/153 ,  H01J2237/24585

Abstract: An apparatus comprising a beam emitter to emit a beam comprising electrons, ions or laser-light photons toward a target substrate. A motion sensor to detect mechanical vibrations of the target substrate. The motion sensor is mechanically coupled to the target substrate, a processor coupled to an output of the motion sensor. The processor is to generate a vibration correction signal proportional to the mechanical vibrations detected by the motion sensor, and beam steering optics coupled to the processor. The beam steering optics are to deflect the beam according to the vibration correction signal to compensate for the mechanical vibrations of the target substrate.

公开(公告)号：US20210305009A1

公开(公告)日：2021-09-30

申请号：US17344134

申请日：2021-06-10

Applicant: Intel Corporation

Inventor： Amir Raveh ,  Gideon Reisfeld ,  Patrick Pardy

IPC: H01J37/153 ,  H01J37/12 ,  H01J37/14 ,  G02B26/08 ,  H01J37/244

Abstract: An apparatus comprising a beam emitter to emit a beam comprising electrons, ions or laser-light photons toward a target substrate. A motion sensor to detect mechanical vibrations of the target substrate. The motion sensor is mechanically coupled to the target substrate, a processor coupled to an output of the motion sensor. The processor is to generate a vibration correction signal proportional to the mechanical vibrations detected by the motion sensor, and beam steering optics coupled to the processor. The beam steering optics are to deflect the beam according to the vibration correction signal to compensate for the mechanical vibrations of the target substrate.

公开(公告)号：US10163601B1

公开(公告)日：2018-12-25

申请号：US15856211

申请日：2017-12-28

Applicant: Intel Corporation

Inventor： Amir Raveh ,  Travis Eiles ,  Evgeny Gregory Nisenboim ,  Patrick Pardy

IPC: G01R31/305 ,  G01R31/306 ,  G01R31/302 ,  G01R31/311 ,  H01J37/073 ,  H01J37/06 ,  H01J37/244 ,  H01J37/14 ,  H01J37/28

Abstract: A probe assembly for analyzing a test device that includes a housing with an electron source disposed therein for emitting primary electrons. A photon source is positioned to emit photons that strike the electron source such that when the photons strike the electron source, the electron source emits the primary electrons. Detection circuitry is provided that is configured to detect secondary electrons emitted from a test device of a test assembly and to form an excitation waveform.