公开(公告)号：US20030226975A1

公开(公告)日：2003-12-11

申请号：US10360605

申请日：2003-02-07

Applicant: JEOL Ltd.

Inventor： G. Martinez Lopez ,  Katsushige Tsuno

IPC: H01J037/147 ,  H01J049/44

CPC classification number: H01J37/261 ,  H01J2237/057 ,  H01J2237/262

Abstract: A Wien filter is provided in which a less amount of secondary aberration is produced than conventional. This filter has 12 poles. These poles have front ends facing the optical axis. These front ends have a 12-fold rotational symmetry about the optical axis within the XY-plane perpendicular to the optical axis.

Abstract translation: 提供了一种维纳滤波器，其中比常规产生少量的二次像差。 该过滤器有12个极。 这些极具有面向光轴的前端。 这些前端在垂直于光轴的XY平面内围绕光轴具有12倍的旋转对称性。

公开(公告)号：US20040144920A1

公开(公告)日：2004-07-29

申请号：US10738966

申请日：2003-12-17

Applicant: JEOL Ltd.

Inventor： G. Martinez Lopez ,  Katsushige Tsuno

IPC: H01J049/44

CPC classification number: H01J37/05 ,  H01J37/153

Abstract: An energy filter with reduced aberration. The energy filter has a first stage of filter for receiving an electron beam entering along the optical axis and for focusing the beam in one direction vertical to the optical axis and a second stage of filter positioned along the optical axis behind the first stage of filter. The beam once focused by the first stage of filter is made to enter the second stage of filter. In the second stage of filter, the orbit of the electron beam is inverted with respect to the focal point. The two stages of filters are identical in length taken along the optical axis. The first and second stages of filters have electric and magnetic quadrupole fields, respectively, along the optical axis. These quadrupole fields make an angle of 45 degrees to the optical axis to achieve astigmatic focusing.

Abstract translation: 具有减小像差的能量滤波器。 能量滤波器具有第一级滤波器，用于接收沿着光轴进入的电子束并且用于在垂直于光轴的一个方向上聚焦光束，以及沿着光轴位于第一级过滤器后面的第二级滤光器。 过滤器第一级聚焦的光束进入第二级过滤器。 在滤波器的第二阶段，电子束的轨道相对于焦点反转。 过滤器的两个阶段沿光轴取长度相同。 滤光器的第一和第二阶段分别具有沿着光轴的电和四极四极场。 这些四极场与光轴成45度的角度，以实现散光聚焦。