公开(公告)号：US20220328280A1

公开(公告)日：2022-10-13

申请号：US17718976

申请日：2022-04-12

Applicant: JEOL Ltd.

Inventor： Takeshi Kaneko ,  Norihiro Okoshi ,  Yu Jimbo ,  Sang Tae Park

IPC: H01J37/22 ,  H01J37/28 ,  H01J37/244

Abstract: A contamination prevention irradiation device includes a generation unit and a mirror unit. The generation unit generates a laser beam. The mirror unit has a mirror surface for reflecting a laser beam. The laser beam reflected on the mirror surface is applied to a specimen disposed inside an objective lens. The laser beam is composed of a pulse train. Once a laser beam is applied to the specimen before observation of the specimen, deposition of contaminants on the specimen can be prevented for a predetermined subsequent period.

公开(公告)号：US12131881B2

公开(公告)日：2024-10-29

申请号：US17718976

申请日：2022-04-12

Applicant: JEOL Ltd.

Inventor： Takeshi Kaneko ,  Norihiro Okoshi ,  Yu Jimbo ,  Sang Tae Park

IPC: H01J37/22 ,  H01J37/244 ,  H01J37/28

CPC classification number: H01J37/22 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/022 ,  H01J2237/2802

Abstract: A contamination prevention irradiation device includes a generation unit and a mirror unit. The generation unit generates a laser beam. The mirror unit has a mirror surface for reflecting a laser beam. The laser beam reflected on the mirror surface is applied to a specimen disposed inside an objective lens. The laser beam is composed of a pulse train. Once a laser beam is applied to the specimen before observation of the specimen, deposition of contaminants on the specimen can be prevented for a predetermined subsequent period.