公开(公告)号：US20210407760A1

公开(公告)日：2021-12-30

申请号：US17324301

申请日：2021-05-19

Applicant: JEOL Ltd.

Inventor： Shio En ,  Takashi Sato

IPC: H01J37/147 ,  H01J37/09 ,  B33Y30/00 ,  B33Y50/00 ,  B22F10/80 ,  B22F12/41 ,  B23K15/00 ,  B23K15/02

Abstract: A beam adjustment method includes: installing, on an irradiation surface to which an electron beam is radiated, a detection part having a Faraday cup catching electrical charges of the electron beam, and installing, on a side of an electron gun further than the detection part, a shielding plate having opening holes through which the electron beam is passable. The method includes causing, upon performing beam diameter measurement processing, the electron beam to pass through the opening holes, and radiating the electron beam to the Faraday cup. In addition, the method includes radiating, upon performing normal processing, the electron beam to the shielding plate.

公开(公告)号：US12020894B2

公开(公告)日：2024-06-25

申请号：US17324301

申请日：2021-05-19

Applicant: JEOL Ltd.

Inventor： Shio En ,  Takashi Sato

IPC: H01J37/147 ,  B22F10/80 ,  B22F12/41 ,  B23K15/00 ,  B23K15/02 ,  B33Y30/00 ,  B33Y50/00 ,  H01J37/09

CPC classification number: H01J37/1474 ,  B22F10/80 ,  B22F12/41 ,  B23K15/002 ,  B23K15/0086 ,  B23K15/02 ,  B33Y30/00 ,  B33Y50/00 ,  H01J37/09

Abstract: A beam adjustment method includes: installing, on an irradiation surface to which an electron beam is radiated, a detection part having a Faraday cup catching electrical charges of the electron beam, and installing, on a side of an electron gun further than the detection part, a shielding plate having opening holes through which the electron beam is passable. The method includes causing, upon performing beam diameter measurement processing, the electron beam to pass through the opening holes, and radiating the electron beam to the Faraday cup. In addition, the method includes radiating, upon performing normal processing, the electron beam to the shielding plate.

公开(公告)号：US20220297193A1

公开(公告)日：2022-09-22

申请号：US17693878

申请日：2022-03-14

Applicant: JEOL Ltd.

Inventor： Masahiko Kawakami ,  Shio En ,  Ayumu Miyakita ,  Yuhei Kaneko

IPC: B22F12/49 ,  B22F10/28 ,  B22F12/41 ,  B33Y10/00 ,  B33Y30/00 ,  B23K26/342 ,  B23K26/60

Abstract: A three-dimensional PBF-AM apparatus includes: a build plate on which a powder material is spread in layers; and a beam irradiation device which irradiates the powder material spread on the build plate with a beam. The beam irradiation device divides a build region of the powder material spread on the build plate into a plurality of lines and performs beam scanning to melt the powder material in the build region line by line, and performs dummy scanning to scan the beam in a state that does not cause melting of the powder material between an end of beam scanning of an M-th (M is a natural number) line and a start of beam scanning of an (M+1)th line.