公开(公告)号：US10381191B2

公开(公告)日：2019-08-13

申请号：US15966372

申请日：2018-04-30

Applicant: JEOL Ltd.

Inventor： Shogo Kataoka ,  Akio Isono

IPC: H01J37/09 ,  H01J37/20 ,  H01J37/305

Abstract: A sample holder unit includes a sample holding portion, a shielding plate, and a rotating mechanism. The rotating mechanism supports the sample and the shielding plate and allows the sample and the shielding plate to rotate. The rotating mechanism is oriented such that an axis of rotation thereof is parallel to both a processing surface of the sample and a direction orthogonal to a direction of projection of the sample from the shielding plate. A center of rotation of the rotating mechanism resides on the processing surface of the sample.

公开(公告)号：US11990312B2

公开(公告)日：2024-05-21

申请号：US17679303

申请日：2022-02-24

Applicant: JEOL Ltd.

Inventor： Shogo Kataoka ,  Koji Todoroki

IPC: H01J37/20 ,  H01J37/30

CPC classification number: H01J37/20 ,  H01J37/30 ,  H01J2237/20214

Abstract: A specimen machining device includes an ion source which irradiates a specimen with an ion beam, a first rotating body (specimen holder) that holds the specimen and is rotatable about a first axis serving as a rotation axis, and a second rotating body on which the first rotating body is disposed and which is rotatable about a second axis serving as a rotation axis different from the first axis. The specimen machining device irradiates the specimen with the ion beam while moving the specimen by the rotation of the first rotating body and the rotation of the second rotating body.

公开(公告)号：US10930466B2

公开(公告)日：2021-02-23

申请号：US15988591

申请日：2018-05-24

Applicant: JEOL Ltd.

Inventor： Shogo Kataoka ,  Shunsuke Asahina

IPC: H01J37/20 ,  H01J37/305 ,  C23C14/58

Abstract: An ion milling apparatus includes an ion irradiation source, a sample holder, a sample stage, a rotation mechanism, and a slide mechanism. The sample holder holds a sample such that the sample protrudes from a shielding plate in a direction perpendicular to an optical axis of an ion beam. The rotation mechanism is disposed such that a rotation center of a rotation shaft is perpendicular to the optical axis of the ion beam and parallel to a direction in which the sample protrudes from the shielding plate. The rotation mechanism supports the sample stage such that the sample stage is rotatable. The slide mechanism supports the sample held by the sample holder such that the sample is movable along the optical axis of the ion beam.

公开(公告)号：US20180342369A1

公开(公告)日：2018-11-29

申请号：US15988591

申请日：2018-05-24

Applicant: JEOL Ltd.

Inventor： Shogo Kataoka ,  Shunsuke Asahina

IPC: H01J37/20 ,  H01J37/305

Abstract: An ion milling apparatus includes an ion irradiation source, a sample holder, a sample stage, a rotation mechanism, and a slide mechanism. The sample holder holds a sample such that the sample protrudes from a shielding plate in a direction perpendicular to an optical axis of an ion beam. The rotation mechanism is disposed such that a rotation center of a rotation shaft is perpendicular to the optical axis of the ion beam and parallel to a direction in which the sample protrudes from the shielding plate. The rotation mechanism supports the sample stage such that the sample stage is rotatable. The slide mechanism supports the sample held by the sample holder such that the sample is movable along the optical axis of the ion beam.

公开(公告)号：US11621143B2

公开(公告)日：2023-04-04

申请号：US17378864

申请日：2021-07-19

Applicant: JEOL Ltd.

Inventor： Shogo Kataoka ,  Tatsuro Mino ,  Koji Todoroki

IPC: H01J37/20 ,  H01J37/305 ,  H01J37/09

Abstract: An ion milling apparatus includes a pair of shielding members sandwiching a sample, and an ion source configured to irradiate the sample with an ion beam. The ion milling apparatus is configured to be capable of irradiating the sample with the ion beam in a first mode of irradiating the sample with the ion beam via one shielding member and in a second mode of irradiating the sample with the ion beam via the other shielding member.

公开(公告)号：US20220277925A1

公开(公告)日：2022-09-01

申请号：US17679303

申请日：2022-02-24

Applicant: JEOL Ltd.

Inventor： Shogo Kataoka ,  Koji Todoroki

IPC: H01J37/20 ,  H01J37/30

Abstract: A specimen machining device includes an ion source which irradiates a specimen with an ion beam, a first rotating body (specimen holder) that holds the specimen and is rotatable about a first axis serving as a rotation axis, and a second rotating body on which the first rotating body is disposed and which is rotatable about a second axis serving as a rotation axis different from the first axis. The specimen machining device irradiates the specimen with the ion beam while moving the specimen by the rotation of the first rotating body and the rotation of the second rotating body.

公开(公告)号：US20180330913A1

公开(公告)日：2018-11-15

申请号：US15966372

申请日：2018-04-30

Applicant: JEOL Ltd.

Inventor： Shogo Kataoka ,  Akio Isono

IPC: H01J37/20 ,  H01J37/09

CPC classification number: H01J37/20 ,  H01J37/09 ,  H01J37/3053 ,  H01J2237/20214 ,  H01J2237/3151

Abstract: A sample holder unit includes a sample holding portion, a shielding plate, and a rotating mechanism. The rotating mechanism supports the sample and the shielding plate and allows the sample and the shielding plate to rotate. The rotating mechanism is oriented such that an axis of rotation thereof is parallel to both a processing surface of the sample and a direction orthogonal to a direction of projection of the sample from the shielding plate. A center of rotation of the rotating mechanism resides on the processing surface of the sample.

公开(公告)号：US11562886B2

公开(公告)日：2023-01-24

申请号：US17400550

申请日：2021-08-12

Applicant: JEOL Ltd.

Inventor： Shogo Kataoka ,  Tatsuro Mino ,  Koji Todoroki

IPC: H01J37/305 ,  G01N1/32

Abstract: An ion milling apparatus has: a sample holder including a shield member for shielding the sample except for a portion to be milled; and a sample locking member cooperating with the shield member such that the sample is sandwiched and held therebetween. The shield member has an edge portion that determines a milling position on or in the sample. The sample locking member is disposed downstream of the edge portion in the direction of irradiation by the ion beam and has a support portion cooperating with the edge portion to support the milled portion therebetween. The support portion has a first surface making contact with the sample and a second surface making a given angle to the first surface. The given angle is equal to or less than 90°.

公开(公告)号：US20220020558A1

公开(公告)日：2022-01-20

申请号：US17378864

申请日：2021-07-19

Applicant: JEOL Ltd.

Inventor： Shogo Kataoka ,  Tatsuro Mino ,  Koji Todoroki

IPC: H01J37/20 ,  H01J37/305 ,  H01J37/09

Abstract: An ion milling apparatus includes a pair of shielding members sandwiching a sample, and an ion source configured to irradiate the sample with an ion beam. The ion milling apparatus is configured to be capable of irradiating the sample with the ion beam in a first mode of irradiating the sample with the ion beam via one shielding member and in a second mode of irradiating the sample with the ion beam via the other shielding member.

公开(公告)号：US10832888B2

公开(公告)日：2020-11-10

申请号：US16299632

申请日：2019-03-12

Applicant: JEOL Ltd.

Inventor： Shogo Kataoka ,  Toru Kagawa

IPC: H01J37/20 ,  H01J37/26 ,  H01J37/305

Abstract: There is provided an ion milling apparatus and sample holder permitting one to observe a sample, which has been milled, with an electron microscope without transferring the sample to a different holding member. The ion milling apparatus has an ion source, a sample holder, and a sample stage. The sample holder includes: a holder body having a sample holding portion for holding the sample; and a cover member detachably mounted to the holder body and hermetically sealing the sample held on the sample holding portion. The holder body has a shield plate and a field-correcting plate for correcting electric fields around the sample held on the sample holding portion.