Spectrometry apparatus, detection apparatus, and method for manufacturing spectrometry apparatus
    1.
    发明授权
    Spectrometry apparatus, detection apparatus, and method for manufacturing spectrometry apparatus 有权
    光谱测定装置,检测装置以及光谱测定装置的制造方法

    公开(公告)号:US08570509B2

    公开(公告)日:2013-10-29

    申请号:US13106373

    申请日:2011-05-12

    Abstract: A spectrometry apparatus includes a transmissive diffraction grating that transmits incident light. The transmissive diffraction grating has inclined surfaces made of a first dielectric material. The inclined surfaces are arranged so that they are inclined relative to a reference line. When the angle of incidence of light incident on the transmissive diffraction grating is measured with respect to the reference line and defined as an angle α, and the angle of diffraction of diffracted light is measured with respect to the reference line and defined as an angle β, the angle of incidence α is smaller than a Bragg angle θ defined with respect to the inclined surfaces, and the angle of diffraction β is greater than the Bragg angle θ.

    Abstract translation: 分光装置包括透射入射光的透射衍射光栅。 透射衍射光栅具有由第一介电材料制成的倾斜表面。 倾斜表面被布置成使得它们相对于参考线倾斜。 当入射到透射衍射光栅上的光的入射角相对于参考线被测量并被定义为角度α时,衍射光的衍射角相对于参考线被测量并被定义为角度β ,入射角α小于相对于倾斜面限定的布拉格角θ,衍射角β大于布拉格角θ。

    Method for producing fine structure
    2.
    发明授权
    Method for producing fine structure 有权
    生产精细结构的方法

    公开(公告)号:US08221963B2

    公开(公告)日:2012-07-17

    申请号:US12342147

    申请日:2008-12-23

    CPC classification number: G03F7/001 G02B5/1857 G03F7/70408

    Abstract: A method for producing a fine structure includes: (a) forming a photosensitive film to cover a plurality of first convex portions formed in at least one surface of a substrate; (b) arranging liquid to cover the photosensitive film on the at least one surface of the substrate; (c) arranging a transparent parallel plate such that the parallel plate opposes the substrate via the liquid; (d) generating interference field by a laser beam to irradiate the interference field onto the photosensitive film via the parallel plate and the liquid; (e) removing the liquid and the parallel plate to develop the photosensitive film so as to form a photosensitive film pattern; and (f) etching the substrate using a mask of the photosensitive film pattern to form a plurality of fine convex portions smaller than the first convex portions on the at least one surface of the substrate. In the method, the liquid arranged at step (b) has a refractive index larger than 1 and equal to or smaller than a refractive index of the photosensitive film.

    Abstract translation: 精细结构的制造方法包括:(a)形成感光膜以覆盖形成在基板的至少一个表面中的多个第一凸部; (b)布置液体以覆盖基板的至少一个表面上的感光膜; (c)布置透明平行板,使得平行板经由液体与基板相对; (d)通过激光束产生干涉场,以通过平行板和液体将干涉场照射到感光膜上; (e)去除液体和平行板以显影感光膜以形成感光膜图案; 以及(f)使用所述感光膜图案的掩模蚀刻所述基板,以形成比所述基板的所述至少一个表面上的所述第一凸部小的多个细小凸部。 在该方法中,在步骤(b)中布置的液体的折射率大于1且等于或小于感光膜的折射率。

    SENSOR CHIP, SENSOR CARTRIDGE, AND ANALYSIS APPARATUS
    3.
    发明申请
    SENSOR CHIP, SENSOR CARTRIDGE, AND ANALYSIS APPARATUS 有权
    传感器芯片,传感器盒和分析仪器

    公开(公告)号:US20110114859A1

    公开(公告)日:2011-05-19

    申请号:US12949142

    申请日:2010-11-18

    Abstract: A sensor chip includes: a substrate that has a planar portion; and a diffraction grating, on which a target substance is placed, that includes a plurality of first protrusions periodically arranged in a period equal to or greater than 100 nm and equal to or less than 1000 nm in a first direction that is parallel to the planar portion, a plurality of base portions that is located between two of the first protrusions adjacent to each other and configures a base of the substrate, and a plurality of second protrusions that is formed on upper faces of the plurality of the first protrusions, has a surface formed from a metal, and is formed on the planar portion.

    Abstract translation: 传感器芯片包括:具有平面部分的基板; 以及衍射光栅,其上放置目标物质,其包括在与平面平行的第一方向上等于或大于100nm且等于或小于1000nm的周期性周期性排列的多个第一突起 位于彼此相邻的两个第一突起之间的多个基部,并且构成基底的基部,并且形成在多个第一突起的上表面上的多个第二突起具有 表面由金属形成,并且形成在平面部分上。

    Liquid crystal device having a diffraction function layer that includes a flat portion and a non-flat portion with a grid disposed in the non-flat portion
    4.
    发明授权
    Liquid crystal device having a diffraction function layer that includes a flat portion and a non-flat portion with a grid disposed in the non-flat portion 有权
    具有衍射功能层的液晶装置,该衍射功能层包括平坦部分和非平坦部分,栅格布置在非平坦部分中

    公开(公告)号:US07944544B2

    公开(公告)日:2011-05-17

    申请号:US12129987

    申请日:2008-05-30

    Abstract: An optical element includes a diffraction function layer for diffracting at least a part of incident light and a grid disposed on a first surface of the diffraction function layer and including a plurality of wires. The first surface includes a plurality of first areas and a plurality of second areas. The first areas and the second areas are different from each other in a height from a second surface of the diffraction function layer as a surface opposite to the first surface. Steps are provided on boundaries between the first areas and the second areas.

    Abstract translation: 光学元件包括用于衍射入射光的至少一部分的衍射功能层和设置在衍射功能层的第一表面上并包括多根导线的栅格。 第一表面包括多个第一区域和多个第二区域。 第一区域和第二区域与衍射功能层的第二表面的高度彼此不同,作为与第一表面相对的表面。 在第一区域和第二区域之间的边界上提供步骤。

    Laser processing method and laser processing apparatus

    公开(公告)号:US06642480B2

    公开(公告)日:2003-11-04

    申请号:US10235934

    申请日:2002-09-06

    Abstract: In a laser processing apparatus including an ultra-short pulse laser a focusing optical system and processing a work by projecting a beam delivered through the focusing optical system on to the work, the focusing optical system has at least a pair of diffractive surface and a refractive surface, and chromatic aberration is corrected or chromatic aberration and pulse extension are corrected by making use of the diffractive dispersions due to and the diffractive surface the refractive dispersion due to of the refractive surface. With this arrangement, chromatic aberration is corrected or both chromatic aberration and pulse expansion are corrected in the processing with the ultra-short pulse laser and thereby improve the practical use and value of the processing by improving its accuray, qualiy and speed.

    Laser machining apparatus with a rotatable phase grating
    6.
    发明授权
    Laser machining apparatus with a rotatable phase grating 失效
    具有可旋转相位光栅的激光加工设备

    公开(公告)号:US06376799B1

    公开(公告)日:2002-04-23

    申请号:US09321802

    申请日:1999-05-27

    Abstract: A laser machining apparatus for performing high-precision machining on a thin film deposited on a substrate, such as a liquid crystal panel. The apparatus includes a pulse laser generator for emitting a laser beam, a driver for driving the pulse laser generator, a phase grating for dividing the laser beam; a rotary stage for rotating the phase grating to control the direction of the beams illuminating an object, and a spatial filter (element 2101).

    Abstract translation: 一种用于对沉积在诸如液晶面板的基板上的薄膜进行高精度加工的激光加工装置。 该装置包括用于发射激光束的脉冲激光发生器,用于驱动脉冲激光发生器的驱动器,用于分割激光束的相位光栅; 用于旋转相位光栅以控制照射物体的光束的方向的旋转台,以及空间滤光器(元件2101)。

    Detection apparatus
    8.
    发明授权
    Detection apparatus 有权
    检测装置

    公开(公告)号:US08902419B2

    公开(公告)日:2014-12-02

    申请号:US13230096

    申请日:2011-09-12

    CPC classification number: G01J3/44 G01J3/0224 G01J3/10 G01N21/658

    Abstract: A detection apparatus includes: a first light source group having a plurality of light sources; a switch that switches the plurality of light sources to activate at least one of the light sources, a first optical system that introduces light from the activated light source into an electrical conductor of an optical device; and a detector that detects Raman scattering light from the light scattered or reflected by the electrical conductor. Each of the plurality of light sources of the first light source group is capable of radiating light having different polarization directions.

    Abstract translation: 一种检测装置,包括:具有多个光源的第一光源组; 开关,其切换所述多个光源以激活所述光源中的至少一个;第一光学系统,其将来自所述激活的光源的光引入光学装置的电导体; 以及检测器,其从由电导体散射或反射的光检测拉曼散射光。 第一光源组的多个光源中的每一个能够发射具有不同偏振方向的光。

    Optical device and analyzing apparatus
    9.
    发明授权
    Optical device and analyzing apparatus 有权
    光学装置和分析装置

    公开(公告)号:US08553220B2

    公开(公告)日:2013-10-08

    申请号:US13106554

    申请日:2011-05-12

    CPC classification number: G01N21/658 G01N21/554

    Abstract: An optical device includes a projection group in which electrically conductive projections are arranged along a direction parallel to a virtual plane. The arrangement period of the projections in the projection group includes at least a first period and a second period different from the first period. The first period and the second period are shorter than a wavelength of an incident light.

    Abstract translation: 光学装置包括投影组,其中导电突起沿着平行于虚拟平面的方向排列。 投影组中的投影的排列期间至少包括与第一期间不同的第一期间和第二期间。 第一周期和第二周期比入射光的波长短。

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