公开(公告)号：US20120098409A1

公开(公告)日：2012-04-26

申请号：US12909745

申请日：2010-10-21

Applicant: Juying DOU

Inventor： Juying DOU

IPC: H01J1/15

CPC classification number: H01J1/15 ,  H01J37/065 ,  H01J2237/0216 ,  H01J2237/061 ,  H01J2237/06316

Abstract: This invention relates to a filament for electron emission cathode which is employed in an electron microscope, a critical dimension examine tool, an electron beam lithograph machine, an electron beam tester and other electron beam related systems as an electron source. Embodiments of the present invention discloses method with which a Re (Rhenium) is used as heat source such that vibration issue of prior tungsten filament can be depressed.

Abstract translation: 本发明涉及一种用于电子显微镜，临界尺寸检测工具，电子束光刻机，电子束测试仪和其他电子束相关系统作为电子源的电子发射阴极灯丝。 本发明的实施例公开了使用Re（铼）作为热源的方法，使得可以抑制现有钨丝的振动发生。