公开(公告)号：US20180240637A1

公开(公告)日：2018-08-23

申请号：US15435976

申请日：2017-02-17

Applicant: Savannah River Nuclear Solutions, LLC

Inventor： Joshua T. Hewitt ,  Gregory Hall ,  Charles R. Schick, JR.

IPC: H01J1/14 ,  H01J49/16 ,  H01J1/15

CPC classification number: H01J1/14 ,  H01J1/15 ,  H01J49/16

Abstract: Methods and systems for thermal ionization of a sample and formation of an ion beam are described. The systems incorporate a thermal ionization filament that is formed of a graphene-based material such as graphite, graphene, graphene oxide, reduced graphene oxide or combinations thereof. The filament material can be doped or chemically modified to control and tune the work function of the filament and improve ionization efficiency of a system incorporating the filament. The systems can be utilized in forming an ion beam for target bombardment or analysis via, e.g., mass spectrometry.

公开(公告)号：US20150187533A1

公开(公告)日：2015-07-02

申请号：US14578533

申请日：2014-12-22

Applicant: MAPPER LITHOGRAPHY IP B.V

Inventor： Laura DINU-GÜRTLER ,  Eric Petrus HOGERVORST

IPC: H01J29/62 ,  G03F7/20 ,  H01J29/48

CPC classification number: H01J37/3174 ,  G03F7/70058 ,  H01J1/15 ,  H01J1/28 ,  H01J3/027 ,  H01J3/029 ,  H01J37/075 ,  H01J37/3177 ,  H01J2229/481 ,  H01J2237/061

Abstract: The invention relates to a cathode arrangement comprising: a cathode body housing an emission surface for emitting electrons in a longitudinal direction, wherein the emission surface is bounded by an emission perimeter; a focusing electrode at least partially enclosing the cathode body in a transversal direction and comprising an electron transmission aperture for focusing the electrons emitted by the emission surface, wherein the aperture is bounded by an aperture perimeter, wherein the cathode body is moveably arranged within the focusing electrode over a maximum transversal distance from an aligned position, and wherein the aperture perimeter transversally extends over the emission surface and beyond the emission perimeter over an overlap distance that exceeds the maximum transversal distance.

Abstract translation: 本发明涉及一种阴极装置，其包括：阴极体，其容纳用于沿纵向发射电子的发射表面，其中所述发射表面由发射周界限定; 聚焦电极至少部分地沿着横向包围阴极体并且包括用于聚焦由发射表面发射的电子的电子传输孔，其中所述孔被孔周边界定，其中阴极体可移动地布置在聚焦 电极，其距离对准位置的最大横向距离，并且其中所述孔径周边在超过所述最大横向距离的重叠距离上在所述发射表面上横向延伸超过所述发射周界。

公开(公告)号：US20140291542A1

公开(公告)日：2014-10-02

申请号：US14224149

申请日：2014-03-25

Applicant: Hitachi High-Tech Science Corporation

Inventor： Anto YASAKA ,  Yasuhiko SUGIYAMA ,  Hiroshi OBA

IPC: H01J27/26 ,  H01J37/08

CPC classification number: H01J27/26 ,  H01J1/15 ,  H01J1/18 ,  H01J3/04 ,  H01J27/024 ,  H01J37/08 ,  H01J2237/002 ,  H01J2237/06316

Abstract: There is provided an emitter structure, a gas ion source including the emitter structure, and a focused ion beam system including the gas ion source. The emitter structure includes a pair of conductive pins which are fixed to a base member, a filament which is connected between the pair of conductive pins, and an emitter which is connected to the filament and has a sharp tip. A supporting member is fixed to the base material, and the emitter is connected to the supporting member.

Abstract translation: 提供了发射极结构，包括发射极结构的气体离子源和包括气体离子源的聚焦离子束系统。 发射极结构包括固定到基底构件的一对导电引脚，连接在一对导电引脚之间的细丝和连接到灯丝并具有尖锐尖端的发射极。 支撑构件固定在基材上，发射体与支撑构件连接。

公开(公告)号：US08764994B2

公开(公告)日：2014-07-01

申请号：US13845630

申请日：2013-03-18

Applicant: Hitachi High-Tech Science Corporation

Inventor： Yasuhiko Sugiyama ,  Kazuo Aita ,  Fumio Aramaki ,  Tomokazu Kozakai ,  Osamu Matsuda ,  Anto Yasaka

IPC: B44C1/22 ,  C25F3/00

CPC classification number: H01J27/02 ,  H01J1/15 ,  H01J1/3044 ,  H01J9/02 ,  H01J9/025 ,  H01J9/04 ,  H01J37/08 ,  H01J37/26 ,  H01J37/3056 ,  H01J2237/3174 ,  H01J2237/31749

Abstract: A method for fabricating a sharpened needle-like emitter, the method including: electrolytically polishing an end portion of an electrically conductive emitter material so as to be tapered toward a tip portion thereof; performing a first etching in which the electrolytically polished part of the emitter material is irradiated with a charged-particle beam to form a pyramid-like sharpened part having a vertex including the tip portion; performing a second etching in which the tip portion is further sharpened through field-assisted gas etching, while observing a crystal structure at the tip portion by a field ion microscope and keeping the number of atoms at a leading edge of the tip portion at a predetermined number or less; and heating the emitter material to arrange the atoms at the leading edge of the tip portion of the sharpened part in a pyramid shape.

Abstract translation: 一种用于制造尖锐的针状发射体的方法，该方法包括：电解抛光导电发射体材料的端部，使其朝其尖端部分逐渐变细; 进行第一蚀刻，其中用电荷粒子束照射发射体材料的电解抛光部分以形成具有包括尖端部分的顶点的棱锥状的锐化部分; 进行第二蚀刻，其中尖端部分通过场辅助气体蚀刻进一步锐化，同时通过场离子显微镜观察尖端部分处的晶体结构，并将尖端部分的前缘处的原子数保持在预定的 数量以下 并且加热发射体材料以将原子布置在尖锐部分的尖端部分的金字塔形状。

公开(公告)号：US20130125526A1

公开(公告)日：2013-05-23

申请号：US13643109

申请日：2011-04-29

Applicant: Frédéric Marchandise ,  Michael Oberg ,  Nicolas Cornu

Inventor： Frédéric Marchandise ,  Michael Oberg ,  Nicolas Cornu

IPC: F03H99/00

CPC classification number: F03H99/00 ,  B64G1/405 ,  F03H1/0031 ,  F03H1/0037 ,  F03H1/0062 ,  F03H1/0068 ,  F03H1/0075 ,  G05D23/24 ,  H01J1/15 ,  H01J1/22 ,  H01J19/08 ,  H01J19/16

Abstract: A Hall effect thruster including: a discharge channel with an open downstream end; a cathode situated outside the discharge channel; an injector system configured to inject atoms of gas into the discharge channel, the injector system situated at an upstream end of the discharge channel and also forming a cathode; a heater device configured to heat the cathode; a measurement mechanism measuring temperature of the heater device, and a regulator circuit regulating the temperature such that the heater device heats so long as its temperature is less than a threshold temperature from which the thruster is capable of starting, and ceases to heat shortly after the threshold temperature has been reached.

Abstract translation: 霍尔效应推进器包括：具有开放的下游端的排放通道; 位于放电通道外的阴极; 喷射器系统，被配置为将气体的原子喷射到排放通道中，所述喷射器系统位于所述排放通道的上游端并且还形成阴极; 构造成加热阴极的加热器装置; 测量加热器装置的温度的测量机构，以及调节温度的调节器电路，使得加热器装置加热，只要其温度低于推进器能够启动的阈值温度，并且在加热器装置之后不久加热 达到阈值温度。

公开(公告)号：US20120098409A1

公开(公告)日：2012-04-26

申请号：US12909745

申请日：2010-10-21

Applicant: Juying DOU

Inventor： Juying DOU

IPC: H01J1/15

CPC classification number: H01J1/15 ,  H01J37/065 ,  H01J2237/0216 ,  H01J2237/061 ,  H01J2237/06316

Abstract: This invention relates to a filament for electron emission cathode which is employed in an electron microscope, a critical dimension examine tool, an electron beam lithograph machine, an electron beam tester and other electron beam related systems as an electron source. Embodiments of the present invention discloses method with which a Re (Rhenium) is used as heat source such that vibration issue of prior tungsten filament can be depressed.

Abstract translation: 本发明涉及一种用于电子显微镜，临界尺寸检测工具，电子束光刻机，电子束测试仪和其他电子束相关系统作为电子源的电子发射阴极灯丝。 本发明的实施例公开了使用Re（铼）作为热源的方法，使得可以抑制现有钨丝的振动发生。

公开(公告)号：US08040034B2

公开(公告)日：2011-10-18

申请号：US12667762

申请日：2008-06-19

Applicant: Ryozo Nonogaki ,  Yoshinori Terui

Inventor： Ryozo Nonogaki ,  Yoshinori Terui

IPC: H01J1/16

CPC classification number: H01J37/28 ,  H01J1/15 ,  H01J37/06 ,  H01J37/065 ,  H01J37/073 ,  H01J2237/061 ,  H01J2237/06316

Abstract: An electron source producing an electron beam which is highly reliable and stable even when it is externally oscillated. The electron source comprises a cathode (1) having an electron emitting section which is so connected to be interposed between top ends of two filaments (3) which are respectively connected to two conductive pins (4) provided on an insulator member (5), an end of the cathode (1) which differs from the electron emitting section being fixed to the insulator member (5), wherein the two filaments (3) are being twofold symmetry with a center on a center axis of the cathode (1), and preferably, the end of the cathode (1) which differs from the electron emitting section is fixed to the insulator member (5) via a metallic member (6) brazed to the insulator member, and more preferably, a curved portion is provided to the filaments.

Abstract translation: 产生电子束的电子源即使在外部振荡时也是高度可靠和稳定的。 电子源包括具有电子发射部分的阴极（1），该电子发射部分被连接以分别连接到设置在绝缘体部件（5）上的两个导电针（4）的两根细丝（3）的顶端之间， 阴极（1）的与电子发射部分不同的端部固定到绝缘体部件（5），其中两根细丝（3）与阴极（1）的中心轴线上的中心是双重对称的， 并且优选地，与电子发射部分不同的阴极（1）的端部通过钎焊到绝缘体构件的金属构件（6）固定到绝缘体构件（5），更优选地，弯曲部分 长丝。

公开(公告)号：US07737614B2

公开(公告)日：2010-06-15

申请号：US11665459

申请日：2006-06-19

Applicant: Akihiko Ueda ,  Yoshiyuki Yamamoto ,  Yoshiki Nishibayashi ,  Takahiro Imai

Inventor： Akihiko Ueda ,  Yoshiyuki Yamamoto ,  Yoshiki Nishibayashi ,  Takahiro Imai

IPC: H01J1/02 ,  H01J19/06

CPC classification number: H01J1/15 ,  H01J1/14 ,  H01J37/06 ,  H01J2237/06308 ,  H01J2237/06316

Abstract: An object is to provide an electron emission cathode and an electron emission source using diamond and having a high brightness and a small energy width that are suitable for electron ray and electron beam devices and vacuum tubes, in particular, electron microscopes and electron beam exposure devices, and also electronic devices using such cathode and source. A diamond electron emission cathode according to the present invention has single crystal diamond in at least part thereof, the diamond electron emission cathode having a columnar shape formed by a sharpened acute section and a heating section, being provided with one electron emitting portion in the sharpened acute section, and being constituted of at least two types of semiconductors that differ in electric properties. One of the types constituting the semiconductors is an n-type semiconductor containing n-type impurities at 2×1015 cm3 or higher, the other one is a p-type semiconductor containing p-type impurities at 2×1015 cm−3 or higher, the p-type semiconductor and the n-type semiconductor are joined together, the heating section is energized parallel to the junction surface and directly heated by a pair of current introducing terminals, and some of the introduced electrons are emitted from the electron emitting portion.

Abstract translation: 目的是提供使用金刚石的电子发射阴极和电子发射源，其具有适用于电子射线和电子束装置和真空管，特别是电子显微镜和电子束曝光装置的高亮度和小的能量宽度 ，以及使用这种阴极和源的电子设备。 根据本发明的金刚石电子发射阴极在其至少一部分中具有单晶金刚石，金刚石电子发射阴极具有由锐化尖锐部分形成的柱状形状和加热部分，在锐化部分中设置有一个电子发射部分 并且由电性能不同的至少两种类型的半导体构成。 构成半导体的种类之一是含有2×1015cm3以上的n型杂质的n型半导体，另一种是含有2×10 15 cm -3以上的p型杂质的p型半导体， p型半导体和n型半导体结合在一起，加热部分被平行于接合面激励并被一对电流引入端直接加热，并且一些引入的电子从电子发射部分发射。

公开(公告)号：US20090323898A1

公开(公告)日：2009-12-31

申请号：US12165279

申请日：2008-06-30

Applicant: PAUL D. MOORE

Inventor： PAUL D. MOORE

IPC: H01J35/06

CPC classification number: H01J35/06 ,  H01J1/15 ,  H01J1/16 ,  H01J2235/06

Abstract: An electron emitter assembly for use in an x-ray emitting device or other electron emitter-containing device is disclosed. In one embodiment, an x-ray tube is disclosed, including a vacuum enclosure that houses both an anode having a target surface, and a cathode positioned with respect to the anode. The cathode includes an electron emitter assembly for emitting a beam of electrons during tube operation. The electron emitter assembly comprises a refractory metal foil with a plurality of shaped rung structures for emitting an electron beam that maximizes flux while simultaneously focusing the electron beam in two dimensions. Focusing occurs primarily through an electrical field shaped by the electron emitter assembly and through balancing current density, electrical resistance, and heat loss through thermal conduction to control the regions that emit electrons. Furthermore, the refractory metal foil can be configured with a modified work function for preferential electron emission.

Abstract translation: 公开了一种用于x射线发射器件或其它含电子发射器的器件中的电子发射器组件。 在一个实施例中，公开了一种X射线管，其包括容纳具有目标表面的阳极和相对于阳极定位的阴极的真空外壳。 阴极包括在管操作期间发射电子束的电子发射器组件。 电子发射器组件包括具有多个成形梯级结构的难熔金属箔，用于发射使通量最大化的电子束，同时将电子束聚焦在两个维度上。 聚焦主要通过由电子发射器组件形成的电场并通过热传导平衡电流密度，电阻和热损失来发生，以控制发射电子的区域。 此外，难熔金属箔可以被配置成具有用于优先电子发射的修改功函数。

公开(公告)号：US07462991B2

公开(公告)日：2008-12-09

申请号：US11059405

申请日：2005-02-16

Applicant: Bruce R. Tremblay ,  Kevin L. McLoughlin

Inventor： Bruce R. Tremblay ,  Kevin L. McLoughlin

IPC: H01J17/04 ,  H01J9/04 ,  H01J9/12 ,  H01K1/14

CPC classification number: H01J61/0672 ,  H01J1/15 ,  H01J9/04

Abstract: A method of making cathodes includes forming a first intermediate assembly having a current wire in juxtaposition with an outer mandrel wire and a basket wire wound around the first two wires. The first intermediate assembly is wound around a central mandrel to form a second intermediate assembly. Pulses of energy are used to produce an alloy solder joint between the current wire and the basket wire at selected locations. The second intermediate assembly is cut into segments, and the mandrels are removed. This results in a cathode having a coiled current wire and a basket wire wound around the current wire, with the basket wire being bonded to the current wire by the alloy solder joints. The cathode includes a central bore that is substantially free of the alloy solder joint.

Abstract translation: 制造阴极的方法包括：形成第一中间组件，该第一中间组件具有与外芯棒线和并列在前两根导线上的筐线并列的电流线。 第一中间组件缠绕在中心心轴上以形成第二中间组件。 能量脉冲用于在选定位置在当前电线和筐线之间产生合金焊点。 将第二中间组件切割成段，并且去除心轴。 这导致阴极具有线圈电流线和围绕电流线缠绕的筐线，筐线通过合金焊点接合到电流线上。 阴极包括基本上不含合金焊点的中心孔。